Microwave cavity-enhanced transduction for plug and play nanomechanics at room temperature

Nature Communications

Volumn 3, Issue , 2012, Pages

  Faust, T ^a   Krenn, P ^a   Manus, S ^a   Kotthaus, J P ^a   Weig, E M ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON NITRIDE;

AMPLITUDE MODULATION; ARTICLE; BROWNIAN MOTION; CONTROLLED STUDY; DIELECTRIC CONSTANT; ELECTRON BEAM; FREQUENCY MODULATION; IMAGE QUALITY; MECHANOTRANSDUCTION; MICROWAVE RADIATION; MOLECULAR MECHANICS; MOTION; NANOELECTROMECHANICAL SYSTEM TRANSDUCER; OSCILLATION; QUALITY CONTROL; RADIATION FIELD; ROOM TEMPERATURE; SIGNAL PROCESSING; TRANSDUCER; VOLTAGE CLAMP;

EID: 84859194797     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms1723     Document Type: Article

References (36)

1. O'Connell, A. D. et al. Quantum ground state and single-phonon control of a mechanical resonator. Nature 464, 697-703 (2010).
2. Teufel, J. D. et al. Sideband cooling of micromechanical motion to the quantum ground state. Nature 475, 359-363 (2011).
3. Chan, J. et al. Laser cooling of a nanomechanical oscillator into its quantum ground state. Nature 478, 89-92 (2011).
4. Lassagne, B., Garcia-Sanchez, D., Aguasca, A. & Bachtold, A. Ultrasensitive mass sensing with a nanotube electromechanical resonator. Nano Lett. 8, 3735-3738 (2008).
5. Jensen, K., Kim, K. & Zettl, A. An atomic-resolution nanomechanical mass sensor. Nat. Nano. 3, 533 (2008).
6. Metzger, C. H. & Karrai, K. Cavity cooling of a microlever. Nature 432, 1002-1005 (2004). (Pubitemid 40052225)
7. Gigan, S. et al. Self-cooling of a micromirror by radiation pressure. Nature 444, 67-70 (2006). (Pubitemid 44684755)
8. Arcizet, O., Cohadon, P. - F., Briant, T., Pinard, M. & Heidmann, A. Radiation-pressure cooling and optomechanical instability of a micromirror. Nature 444, 71-74 (2006). (Pubitemid 44684756)
9. Kleckner, D. & Bouwmeester, D. Sub-kelvin optical cooling of a micromechanical resonator. Nature 444, 75-78 (2006). (Pubitemid 44684757)
10. Schliesser, A., Riviere, R., Anetsberger, G., Arcizet, O. & Kippenberg, T. J. Resolved-sideband cooling of a micromechanical oscillator. Nat. Phys. 4, 415-419 (2008).
11. Eichenfield, M., Camacho, R., Chan, J., Vahala, K. J. & Painter, O. A picogram-and nanometre-scale photonic-crystal optomechanical cavity. Nature 459, 550-555 (2009).
12. Brown, K. R. et al. Passive cooling of a micromechanical oscillator with a resonant electric circuit. Phys. Rev. Lett. 99, 137205 (2007).
13. Regal, C. A., Teufel, J. D. & Lehnert, K. W. Measuring nanomechanical motion with a microwave cavity interferometer. Nat. Phys. 4, 555-560 (2008).
14. Sillanpää, M. A., Sarkar, J., Sulkko, J., Muhonen, J. & Hakonen, P. J. Accessing nanomechanical resonators via a fast microwave circuit. Appl. Phys. Lett. 95, 011909 (2009).
15. Sulkko, J. et al. Strong gate coupling of high-q nanomechanical resonators. Nano Lett. 10, 4884-4889 (2010).
16. Rocheleau, T. et al. Preparation and detection of a mechanical resonator near the ground state of motion. Nature 463, 72-75 (2010).
17. Hao, L., Gallop, J. C. & Cox, D. Excitation, detection, and passive cooling of a micromechanical cantilever using near-field of a microwave resonator. Appl. Phys. Lett. 95, 113501 (2009).
18. Sekaric, L., Carr, D. W., Evoy, S., Parpia, J. M. & Craighead, H. G. Nanomechanical resonant structures in silicon nitride: fabrication, operation and dissipation issues. Sens. Actuators A: Phys. 101, 215-219 (2002).
19. Yu, P.- L., Purdy, T. P. & Regal, C. A. Control of material damping in high-Q membrane microresonators. Preprint at http://arxiv.org/abs/1111.170 (2011).
20. Schmid, S., Wendlandt, M., Junker, D. & Hierold, C. Nonconductive polymer microresonators actuated by the kelvin polarization force. Appl. Phys. Lett. 89, 163506 (2006).
21. Unterreithmeier, Q. P., Weig, E. M. & Kotthaus, J. P. Universal transduction scheme for nanomechanical systems based on dielectric forces. Nature 458, 1001-1004 (2009).
22. Anetsberger, G. et al. Near-field cavity optomechanics with nanomechanical oscillators. Nat. Phys. 5, 909-914 (2009).
23. McRae, T. G., Lee, K. H., Harris, G. I., Knittel, J. & Bowen, W. P. Cavity optoelectromechanical system combining strong electrical actuation with ultrasensitive transduction. Phys. Rev. A 82, 023825 (2010).
24. Retajczyk, T. F. & Sinha, A. K. Elastic stiffiness and thermal expansion coefficients of various refractory silicides and silicon nitride films. Thin Solid Films 70, 241-247 (1980). (Pubitemid 11455452)
25. Unterreithmeier, Q. P., Faust, T. & Kotthaus, J. P. Damping of nanomechanical resonators. Phys. Rev. Lett. 105, 027205 (2010).
26. Verbridge, S. S., Parpia, J. M., Reichenbach, R. B., Bellan, L. M. & Craighead, H. G. High quality factor resonance at room temperature with nanostrings under high tensile stress. J. Appl. Phys. 99, 124304 (2006).
27. Marquardt, F., Chen, J. P., Clerk, A. A. & Girvin, S. M. Quantum theory of cavity-assisted sideband cooling of mechanical motion. Phys. Rev. Lett. 99, 093902 (2007).
28. Teufel, J. D., Regal, C. A. & Lehnert, K. W. Prospects for cooling nanomechanical motion by coupling to a superconducting microwave resonator. New J. Phys. 10, 095002 (2008).
29. Clerk, A. A., Devoret, M. H., Girvin, S. M., Marquardt, F. & Schoelkopf, R. J. Introduction to quantum noise, measurement, and amplification. Rev. Mod. Phys. 82, 1155-1208 (2010).
30. Feng, X. L., White, C. J., Hajimiri, A. & Roukes, M. L. A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator. Nat. Nano 3, 342 (2008).
31. Pernice, W. H. P., Li, M. & Tang, H. X. Optomechanical coupling in photonic crystal supported nanomechanical waveguides. Opt. Express 17, 12424-12432 (2009).
32. Lin, Q., Rosenberg, J., Jiang, X., Vahala, K. J. & Painter, O. Mechanical oscillation and cooling actuated by the optical gradient force. Phys. Rev. Lett. 103, 103601 (2009).
33. Eichenfield, M., Chan, J., Camacho, R. M., Vahala, K. J. & Painter, O. Optomechanical crystals. Nature 462, 78-82 (2009).
34. Mahboob, I. & Yamaguchi, H. Parametrically pumped ultrahigh q electromechanical resonator. Appl. Phys. Lett. 92, 253109 (2008).
35. Knobel, R. G. & Cleland, A. N. Nanometre-scale displacement sensing using a single electron transistor. Nature 424, 291-293 (2003). (Pubitemid 36899366)
36. Thompson, J. D. et al. Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane. Nature 452, 72-75 (2008). (Pubitemid 351355099)