On the self-assembly of brush block copolymers in thin films

ACS Nano

Volumn 7, Issue 11, 2013, Pages 9684-9692

  Hong, Sung Woo ^a   Gu, Weiyin ^a   Huh, June ^b   Sveinbjornsson, Benjamin R ^c   Jeong, Gajin ^a   Grubbs, Robert Howard ^a,c   Russell, Thomas P ^a  

^a UNIVERSITY OF MASSACHUSETTS   (United States)

^b Yonsei University   (South Korea)

^c California Institute of Technology   (United States)

Author keywords

brush polymers; large feature sizes; periodic nanopatterns; self assembly; solvent annealing

Indexed keywords

BRUSH POLYMERS; CHAIN ENTANGLEMENTS; DEGREE OF POLYMERIZATION; FEATURE SIZES; LAMELLAR MICRODOMAINS; NANO PATTERN; SELECTIVE ETCHING; SOLVENT-ANNEALING;

BLOCK COPOLYMERS; CHAINS; MOLECULAR WEIGHT; SCAFFOLDS; SELF ASSEMBLY; SUBSTRATES; THIN FILMS;

BRUSHES;

EID: 84888884291     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn402639g     Document Type: Article

References (51)

1. 11 Holes in 1 Square Centimeter Science 1997, 276, 1401-1404 (Pubitemid 27235405)
2. Li, R. R.; Dapkus, P. D.; Thompson, M. E.; Jeong, W. G.; Harrison, C.; Chaikin, P. M.; Register, R. A.; Adamson, D. H. Dense Arrays of Ordered GaAs Nanostructures by Selective Area Growth on Substrates Patterned by Block Copolymer Lithography Appl. Phys. Lett. 2000, 76, 1689-1691
3. Thurn-Albrecht, T.; Schotter, J.; Kästle, G. A.; Emley, N.; Shibauchi, T.; Krusin-Elbaum, L.; Guarini, K.; Black, C. T.; Tuominen, M. T.; Russell, T. P. Ultrahigh-Density Nanowire Arryas Grown in Self-Assembled Diblock Copolymer Templates Science 2000, 290, 2126-2129 (Pubitemid 32001589)
4. 2 Posts via Block Copolymer Templates Adv. Mater. 2001, 13, 795-797 (Pubitemid 32543978)
5. Cheng, J. Y.; Ross, C. A.; Chan, V. Z.-H.; Thomas, E. L.; Lammertink, R. G. H.; Vancso, G. J. Formation of a Cobalt Magnetic Dot Array via Block Copolymer Lithography Adv. Mater. 2001, 13, 1174-1178 (Pubitemid 32798077)
6. Black, C. T.; Guarini, K. W.; Milkove, K. R.; Baker, S. M.; Russell, T. P.; Tuominen, M. T. Integration of Self-Assembled Diblock Copolymers for Semiconductor Capacitor Fabrication Appl. Phys. Lett. 2001, 79, 409-411 (Pubitemid 32683705)
7. Lopes, W.; Jaeger, H. M. Hierarchical Self-Assembly of Metal Nanostructures on Diblock Copolymer Scaffolds Nature 2001, 414, 735-738 (Pubitemid 34000767)
8. Black, C. T. Self-Aligned Self Assembly of Multi-Nanowire Silicon Field Effect Transistors Appl. Phys. Lett. 2005, 87, 163116-1-3
9. Pelletier, V.; Asakawa, K.; Wu, M.; Adamson, D. H.; Register, R. A.; Chaikin, P. M. Aluminum Nanowire Polarizing Grids: Fabrication and Analysis Appl. Phys. Lett. 2006, 88, 211114-1-3
10. Cheng, J. Y.; Ross, C. A.; Smith, H. I.; Thomas, E. L. Templated Self-Assembly of Block Copolymers: Top-Down Helps Bottom-Up Adv. Mater. 2006, 18, 2505-2521 (Pubitemid 44563465)
11. Kang, Y.; Walish, J. J.; Gorishnyy, T.; Thomas, E. L. Broad-Wavelength-Range Chemically Tunable Block-Copolymer Photonic Gels Nat. Mater. 2007, 6, 957-960 (Pubitemid 350210571)
12. Luttge, R. Massively Parallel Fabrication of Repetitive Nanostructures: Nanolithography for Nanoarrays J. Phys. D: Appl. Phys. 2009, 42, 123001-1-18
13. 2 Adv. Mater. 2011, 22, 5755-5760
14. Hong, S. W.; Russell, T. P. In Block Copolymer Thin Films: A Comprehensive Polymer Sciences, 2 nd ed.; Matyjaszewski, K.; Möller, M., Eds.; Elsevier: Amsterdam, 2012; Vol. 7, pp 45-69.
15. Gu, X.; Liu, Z.; Gunkel, I.; Chourou, S. T.; Hong, S. W.; Olynick, D. L.; Russell, T. P. High Aspect Ratio sub-15 nm Silicon Trenches from Block Copolymer Templates Adv. Mater. 2012, 24, 5688-5694
16. Bates, F. S.; Fredrickson, G. H. Block Copolymer Thermodynamics: Theory and Experiment Annu. Rev. Phys. Chem. 1990, 41, 525-557
17. Hamley, I. W. Nanostruture Fabrication using Block Copolymers Nanotechnology 2003, 14, R39-R54
18. Park, C.; Yoon, J.; Thomas, E. L. Enabling Nanotechnology with Self Assembled Block Copolymer Patterns Polymer 2003, 44, 6725-6760 (Pubitemid 37210458)
19. Segalman, R. A. Patterning with Block Copolymer Thin Films Mater. Sci. Eng., R 2005, 48, 191-226 (Pubitemid 40303052)
20. Stoykovich, P.; Nealey, P. F. Block Copolymers and Conventional Lithography Mater. Today 2006, 9, 20-29 (Pubitemid 44224164)
21. Park, S.; Lee, D. H.; Xu, J.; Kim, B.; Hong, S. W.; Jeong, U.; Xu, T.; Russell, T. P. Macroscopic 10-Terabit-per-Square-Inch Arrays from Block Copolymers with Lateral Order Science 2009, 323, 1030-1033
22. Marencic, A. P.; Register, R. A. Controlling Order in Block Copolymer Thin Films for Nanopatterning Applications Annu. Rev. Chem. Biomol. Eng. 2010, 1, 277-297
23. Albert, J. N. L.; Epps, T. H., III Self-Assembly of Block Copolymer Thin Films Mater. Today 2010, 13, 24-33
24. Tseng, Y.-C.; Darling, S. B. Block Copolymer Nanostructures for Technology Polymers 2010, 2, 470-489
25. Gedde, U. F. Polymer Physics; Springer: London, 1995.
26. Ramachandrarao, V. S.; Gupta, R. R.; Russell, T. P.; Watkins, J. J. Rapid Directed Assembly of Block Copolymer Films at Elevated Temperatures Macromolecules 2001, 34, 7923-7925
27. Kim, E.; Ahn, H.; Park, S.; Lee, M.; Lee, S.; Kim, T.; Kwak, E. A.; Lee, J. H.; Lei, X.; Huh, J. et al. Directed Assembly of High Molecular Weight Block Copolymers: Highly Ordered Line Patterns of Perpendicularly Oriented Lamellae with Large Periods ACS Nano 2013, 7, 1952-1960
28. Fink, Y.; Urbas, A. M.; Bawendi, M. G.; Joannopoulos, J. D.; Thomas, E. L. Block Copolymers as Photonic Bandgap Materials J. Lightwave Technol. 1999, 17, 1963-1969 (Pubitemid 30518934)
29. Kang, C.; Kim, E.; Baek, H.; Hwang, K.; Kwak, D.; Kang, Y.; Thomas, E. L. Full Color Stop Bands in Hybrid Organic/Inorganic Block Copolymer Photonic Gels by Swelling-Freezing J. Am. Chem. Soc. 2009, 131, 7538-7539
30. Yoon, J.; Mathers, R. T.; Coates, G. W.; Thomas, E. L. Optically Transparent and High Molecular Weight Polyolefin Block Copolymers Toward Self-Assembled Photonic Band Gap Materials Macromolecules 2006, 39, 1913-1919
31. Xia, Y.; Olsen, B. D.; Kornfield, J. A.; Grubbs, R. H. Efficient Synthesis of Narrowly Dispersed Brush Copolymers and Study of Their Assemblies: the Importance of Side Chain Arrangement J. Am. Chem. Soc. 2009, 131, 18525-18532
32. Saariaho, M.; Subbotin, A.; Szleifer, I.; Ikkala, O.; ten Brinke, G. Synthesis and Solubility of (Mono-) End-Functionalized Poly(2-hydroxyethyl methacrylate-g-ethylene glycol) Graft Copolymers with Varying Macromolecular Architectures Macromolecules 1999, 32, 4439-4443
33. Neugebauer, D.; Zhang, Y.; Pakula, T.; Matyjaszewski, K. PDMS-PEO Densely-Grafted Copolymers Macromolecules 2005, 38, 8687-8693
34. Neugebauer, D.; Theis, M.; Pakul, T.; Wegner, G.; Matyjaszewski, K. Densely-Heterografted Brush Macromolecules with Crystallizable Grafts Macromolecules 2006, 39, 584-593 (Pubitemid 43164572)
35. Hu, M.; Xia, Y.; McKenna, G. B.; Kornfield, J. A.; Grubbs, R. H. Linear Rheological Response of a Series of Densely Branched Brush Polymers Macromolecules 2011, 44, 6935-6943
36. Runge, M. B.; Dutta, S.; Bowden, N. B. Synthesis of Comb Block Copolymers by ROMP, ATRP, and ROP and their Assembly in the Solid State Macromolecules 2006, 39, 498-508 (Pubitemid 43164563)
37. Rzayev, J. Synthesis of polystyrene-polylactide Bottlebrush Block Copolymers and their Melt Self-Assembly into Large Domain Nanostructures Macromolecules 2009, 42, 2135-2141
38. Hadjichristidis, N.; Pitsikalis, M.; Iatrou, H.; Pispas, S. The Strength of the Macromonomer Strategy for Complex Macromolecular Architecture: Molecular Characterization, Properties and Applications of Polymacromonomers Macromol. Rapid Commun. 2003, 24, 979-1013
39. Neugebauer, D.; Sumerlin, B. S.; Matyjaszewski, K.; Goodhart, B.; Sheiko, S. S. How Dense are Cylindrical Brushes Grafted from a Multifunctional Macroinitiator? Polymer 2004, 45, 8173-8179 (Pubitemid 39457684)
40. Schappacher, M.; Deffieux, A. From Combs to Comb-g-Comb Centipedes Macromolecules 2005, 38, 7209-7213
41. Gao, H.; Matyjaszewski, K. Synthesis of Molecular Brushes by "Grafting onto" Methods: Combination of ATRP and Click Reactions J. Am. Chem. Soc. 2007, 129, 6633-6639 (Pubitemid 46799362)
42. Runge, M. B.; Bowden, N. B. Synthesis of High Molecular Weight Comb Block Copolymers and their Assembly into Ordered Morphologies in the Solid State J. Am. Chem. Soc. 2007, 129, 10551-10560 (Pubitemid 47330274)
43. Gu, W.; Huh, J.; Hong, S. W.; Sveinbjornsson, B. R.; Park, C.; Grubbs, R. H.; Russell, T. P. Self-Assembly of Symmetric Brush Diblock Copolymers ACS Nano 2013, 7, 2551-2558
44. Sveinbjornsson, B. R.; Weitekamp, R. A.; Miyake, G. M.; Xia, Y.; Atwater, H. A.; Grubbs, R. H. Rapid Self-Assembly of Brush Block Copolymers to Photonic Crystals Proc. Natl. Acad. Sci. U.S.A. 2012, 109, 14332-14336
45. Vayer, M.; Hillmyer, M. A.; Dirany, M.; Thevenin, G.; Erre, R.; Sinturel, C. Perpendicular Orientation of Cylindrical Domains upon Solvent Annealing Thin Films of Polystyrene-b-polylactide Thin Solid Films 2010, 518, 3710-3715
46. Delamarche, E.; Michel, B.; Gerber, C.; Anselmetti, D.; Guentherodt, H. J.; Wolf, H.; Ringsdorf, H. Real-Space Observation of Nanoscale Molecular Domains in Self-Assembled Monolayers Langmuir 1994, 10, 2869-2871
47. Mansky, P.; Liu, Y.; Huang, E.; Russell, T. P.; Hawker, C. J. Controlling Polymer-Surface Interactions with Random Copolymer Brushes Science 1997, 275, 1458-1460 (Pubitemid 27111289)
48. Ryu, D. Y.; Shin, K.; Drockenmuller, E.; Hawker, C. J.; Russell, T. P. A Generalized Approach to the Modification of Solid Surfaces Science 2005, 308, 236-239 (Pubitemid 40558855)
49. Ji, S.; Liu, C. C.; Son, J. G.; Gotrik, K.; Craig, G. S. W.; Gopalan, P.; Himpsel, F. J.; Char, K.; Nealey, P. F. Generalization of the Use of Random Copolymers to Control the Wetting Behavior of Block Copolymer Films Macromolecules 2008, 41, 9098-9103
50. Russell, T. P.; Coulon, G.; Deline, V. R.; Miller, D. C. Characteristics of the Surface-Induced Orientation for Symmetric Diblock PS/PMMA Copolymers Macromolecules 1989, 22, 4600-4606
51. Anastasiadis, S. H.; Russell, T. P.; Satija, S. K.; Majkrzak, C. F. The Morphology of Symmetric Diblock Copolymers as Revealed by Neutron Reflectivity J. Chem. Phys. 1990, 92, 5677-5691