Leidenfrost temperature related CVD-like growth mechanism in ZnO-TFTs deposited by pulsed spray pyrolysis

Journal of Crystal Growth

Volumn 363, Issue , 2013, Pages 185-189

  Ortel, Marlis ^a   Wagner, Veit ^a  

^a JACOBS UNIVERSITY BREMEN   (Germany)

Author keywords

A1. Film growth; A1. Leidenfrost; A2. Spray pyrolysis; A3. Chemical vapor deposition processes; B1. Zinc oxide; B3. Thin film transistor

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DEPOSITION; FIELD EFFECT TRANSISTORS; FILM GROWTH; METALLIC FILMS; OXIDE FILMS; PYROLYSIS; SEMICONDUCTING FILMS; SEMICONDUCTING ORGANIC COMPOUNDS; SUBSTRATES; SURFACE ROUGHNESS; THIN FILM CIRCUITS; THIN FILM TRANSISTORS; THIN FILMS; VAPOR DEPOSITION; ZINC; ZINC COMPOUNDS; ZINC OXIDE;

A1. LEIDENFROST; CHEMICAL VAPOR DEPOSITION PROCESS; ELECTRONIC APPLICATION; LEIDENFROST TEMPERATURE; PULSED SPRAY PYROLYSIS; SEMI-CONDUCTING PROPERTY; ZINC ACETATE PRECURSOR; ZINC OXIDE THIN FILMS;

SPRAY PYROLYSIS;

EID: 84888370227     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2012.10.043     Document Type: Article

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