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Volumn 23, Issue 8, 2013, Pages 1094-1099

Self-tuning fault diagnosis of MEMS

Author keywords

Fault diagnosis; MEMS; Self tuning

Indexed keywords

FAILURE ANALYSIS; KALMAN FILTERS; MEMS;

EID: 84888315633     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2013.08.006     Document Type: Article
Times cited : (16)

References (28)
  • 4
    • 84856525576 scopus 로고    scopus 로고
    • PhD. dissertation, West Virginia University, Lane Department of Computer Science and Electrical Engineering; May
    • Izadian. Automatic control and fault diagnosis of MEMS lateral comb resonators, PhD. dissertation, West Virginia University, Lane Department of Computer Science and Electrical Engineering; May 2008.
    • (2008) Automatic Control and Fault Diagnosis of MEMS Lateral Comb Resonators
    • Izadian1
  • 5
    • 0030396701 scopus 로고    scopus 로고
    • Multimode digital control of suspended polysilicon microstructure
    • G.K. Fedder, and R.T. Howe Multimode digital control of suspended polysilicon microstructure IEEE, J Microelectromech Syst 5 4 1996 283 297
    • (1996) IEEE, J Microelectromech Syst , vol.5 , Issue.4 , pp. 283-297
    • Fedder, G.K.1    Howe, R.T.2
  • 6
    • 0026968617 scopus 로고
    • Electrostatic comb drive levitation and control method
    • W.T. Tang, M.G. Lim, and R.T. Howe Electrostatic comb drive levitation and control method IEEE, J Microelectromech Syst 1 4 1992 170 178
    • (1992) IEEE, J Microelectromech Syst , vol.1 , Issue.4 , pp. 170-178
    • Tang, W.T.1    Lim, M.G.2    Howe, R.T.3
  • 8
    • 0033689269 scopus 로고    scopus 로고
    • Prototype Feedback-controlled bi-directional actuation system for MEMS applications
    • S. Bhansali, A.L. Zhang, R.B. Zmood, P.E. Jones, and D.K. Sood Prototype Feedback-controlled bi-directional actuation system for MEMS applications J Microelectromech Syst 9 2 2000 245 251
    • (2000) J Microelectromech Syst , vol.9 , Issue.2 , pp. 245-251
    • Bhansali, S.1    Zhang, A.L.2    Zmood, R.B.3    Jones, P.E.4    Sood, D.K.5
  • 9
    • 0034848505 scopus 로고    scopus 로고
    • Active suspension vibration control with dual stage actuators in hard disk drives
    • Arlington, VA, June 25-27
    • Li Y, Horowitz R. Active suspension vibration control with dual stage actuators in hard disk drives. In: Proceedings of American control conference, Arlington, VA, June 25-27; 2001. p. 2786-91.
    • (2001) Proceedings of American Control Conference , pp. 2786-2791
    • Li, Y.1    Horowitz, R.2
  • 11
    • 65549143349 scopus 로고    scopus 로고
    • Fault diagnosis of time-varying parameter systems with application in MEMS LCRs
    • A. Izadian, P. Khayyer, and P. Famouri Fault diagnosis of time-varying parameter systems with application in MEMS LCRs IEEE Trans Ind Electron Invited Paper 56 4 2009 973 978
    • (2009) IEEE Trans Ind Electron Invited Paper , vol.56 , Issue.4 , pp. 973-978
    • Izadian, A.1    Khayyer, P.2    Famouri, P.3
  • 12
    • 77956231971 scopus 로고    scopus 로고
    • Intelligent fault diagnosis of MEMS micro comb resonators using multiple-model adaptive control technique
    • A. Izadian, and P. Famouri Intelligent fault diagnosis of MEMS micro comb resonators using multiple-model adaptive control technique IEEE Trans Control Syst Technol 18 5 2010 1233 1240
    • (2010) IEEE Trans Control Syst Technol , vol.18 , Issue.5 , pp. 1233-1240
    • Izadian, A.1    Famouri, P.2
  • 13
    • 46849110986 scopus 로고    scopus 로고
    • Reliability enhancement of micro comb resonators under fault conditions
    • A. Izadian, and P. Famouri Reliability enhancement of micro comb resonators under fault conditions IEEE Trans Control Syst Technol 16 4 2008 726 734
    • (2008) IEEE Trans Control Syst Technol , vol.16 , Issue.4 , pp. 726-734
    • Izadian, A.1    Famouri, P.2
  • 14
    • 58249090807 scopus 로고    scopus 로고
    • Structure rotation and pull-in voltage control of MEMS lateral comb resonators under fault conditions
    • A. Izadian, L. Hornak, and P. Famouri Structure rotation and pull-in voltage control of MEMS lateral comb resonators under fault conditions IEEE Trans Control Syst Technol 17 1 2009 51 59
    • (2009) IEEE Trans Control Syst Technol , vol.17 , Issue.1 , pp. 51-59
    • Izadian, A.1    Hornak, L.2    Famouri, P.3
  • 16
    • 0033738583 scopus 로고    scopus 로고
    • Multiple-model adaptive estimation using a residual correlation kalman filter bank
    • P.D. Hanlon, and P.S. Maybeck Multiple-model adaptive estimation using a residual correlation kalman filter bank IEEE Trans Aerospace Electron Syst 36 2 2000
    • (2000) IEEE Trans Aerospace Electron Syst , vol.36 , Issue.2
    • Hanlon, P.D.1    Maybeck, P.S.2
  • 17
    • 65549107944 scopus 로고    scopus 로고
    • PhD. dissertation, West Virginia University, Lane Department of Computer Science and Electrical Engineering; May
    • Wang L. Modeling and real-time feedback control of MEMS devices, PhD. dissertation, West Virginia University, Lane Department of Computer Science and Electrical Engineering; May 2004.
    • (2004) Modeling and Real-time Feedback Control of MEMS Devices
    • Wang, L.1
  • 19
    • 0014814475 scopus 로고
    • Least-squares estimation: From Gauss to Kalman
    • H.W. Sorenson Least-squares estimation: from Gauss to Kalman IEEE Spectr 7 1970 63 68
    • (1970) IEEE Spectr , vol.7 , pp. 63-68
    • Sorenson, H.W.1
  • 22
    • 0033738583 scopus 로고    scopus 로고
    • Multiple-model adaptive estimation using a residual correlation Kalman filter bank
    • P. Hanlon, and P.S. Maybeck Multiple-model adaptive estimation using a residual correlation Kalman filter bank IEEE, Trans Aerospace Electron Syst 36 2 2000 393 406
    • (2000) IEEE, Trans Aerospace Electron Syst , vol.36 , Issue.2 , pp. 393-406
    • Hanlon, P.1    Maybeck, P.S.2
  • 23
    • 0345929238 scopus 로고    scopus 로고
    • Analytical and qualitative model-based fault diagnosis - A survey and some new results
    • P.M. Frank Analytical and qualitative model-based fault diagnosis - a survey and some new results Eur J Control 2 1996 6 28
    • (1996) Eur J Control , vol.2 , pp. 6-28
    • Frank, P.M.1
  • 25
    • 0031148143 scopus 로고    scopus 로고
    • Supervision, fault-detection and fault-diagnosis methods - An introduction
    • R. lsermann Supervision, fault-detection and fault-diagnosis methods - an introduction Control Eng Practice 5 5 1997 639 652
    • (1997) Control Eng Practice , vol.5 , Issue.5 , pp. 639-652
    • Lsermann, R.1
  • 26
    • 36549000173 scopus 로고    scopus 로고
    • A fault detection and isolation scheme for industrial systems based on multiple operating models
    • M. Rodrigues, D. Theilliol, M. Adam-Medina, and D. Sauter A fault detection and isolation scheme for industrial systems based on multiple operating models Control Eng Practice 16 2008 225 239
    • (2008) Control Eng Practice , vol.16 , pp. 225-239
    • Rodrigues, M.1    Theilliol, D.2    Adam-Medina, M.3    Sauter, D.4
  • 27
    • 79551562848 scopus 로고    scopus 로고
    • Multiple model Kalman filter for attitude determination of precision pointing spacecraft
    • K. Xiong, T. Liang, and L. Yongjun Multiple model Kalman filter for attitude determination of precision pointing spacecraft Acta Astronaut 68 7-8 2011 843 852
    • (2011) Acta Astronaut , vol.68 , Issue.78 , pp. 843-852
    • Xiong, K.1    Liang, T.2    Yongjun, L.3
  • 28
    • 71949119907 scopus 로고    scopus 로고
    • Multiple model-based adaptive reconfiguration control for actuator fault
    • Guo Yu-Ying, and JIANG Bin Multiple model-based adaptive reconfiguration control for actuator fault Acta Automatica Sinica 35 11 2009
    • (2009) Acta Automatica Sinica , vol.35 , Issue.11
    • Yu-Ying, G.1    Bin, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.