Multi-scale thickness and roughness characterization of thin silicon-on-insulator films

ECS Journal of Solid State Science and Technology

Volumn 2, Issue 9, 2013, Pages

  Acosta Alba, Pablo E ^a,b   Kononchuk, Oleg ^a   Riou, Grégory ^a   Moulin, Cécile ^a   Bertrand Giuliani, Christelle ^a   Claverie, Alain ^b  

^a PARC TECHNOLOGIQUE DES FONTAINES   (France)

^b UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84887379570     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.013309jss     Document Type: Article

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