SCOPUS 정보 검색 플랫폼

Volumn 20, Issue 6, 2013, Pages

Processing-structure-property correlation in DC sputtered molybdenum thin films

Author keywords

films; Molybdenum; PVD; resistivity; sputtering; strain

Indexed keywords

CHAMBER PRESSURE; GLASS SUBSTRATES; HIGH PRESSURE; INTERFACIAL STRENGTH; LOW PRESSURES; POOR ADHESION; RESIDUAL STRAINS; VAN DER PAUW METHOD;

ELECTRIC CONDUCTIVITY; FILMS; MOLYBDENUM; PHYSICAL VAPOR DEPOSITION; SPUTTERING; STRAIN; SUBSTRATES; THIN FILMS;

TOPOGRAPHY;

EID: 84887082362 PISSN: 0218625X EISSN: None Source Type: Journal
DOI: 10.1142/S0218625X13500650 Document Type: Article

Times cited : (2)

References (14)

1
- 33847404020
- G. Jin, B.-S. Xu, H.-D. Wang, Q.-F. Li and S.-C. Wei, Surf. Coat. Technol. 201(15) (2007) 6678
- (2007) Surf. Coat. Technol , vol.201 , Issue.15 , pp. 6678
- Jin, G.¹ Xu, B.-S.² Wang, H.-D.³ Li, Q.-F.⁴ Wei, S.-C.⁵

2
- 80051544895
- Z. H. Li, E. S. Cho and S. J. Kwon, Appl. Surf. Sci. 257 (2011) 9682
- (2011) Appl. Surf. Sci , vol.257 , pp. 9682
- Li, Z.H.¹ Cho, E.S.² Kwon, S.J.³

3
- 80052073286
- F. Dejene, J. Mater. Sci. 46(21) (2011) 6981
- (2011) J. Mater. Sci , vol.46 , Issue.21 , pp. 6981
- Dejene, F.¹

4
- 77953159889
- T. K. Todorov, K. B. Reuter and D. B. Mitzi, Adv. Mater. 22 (2010) E156
- (2010) Adv. Mater , vol.22
- Todorov, T.K.¹ Reuter, K.B.² Mitzi, D.B.³

5
- 56949105608
- H. Katagiri, K. Jimbo, S. Yamada, T. Kamimura, W. S. Maw, T. Fukano, T. Ito and T. Motohiro, Appl. Phys. Exp. 1 (2008) 041201
- (2008) Appl. Phys. Exp , vol.1 , pp. 041201
- Katagiri, H.¹ Jimbo, K.² Yamada, S.³ Kamimura, T.⁴ Maw, W.S.⁵ Fukano, T.⁶ Ito, T.⁷ Motohiro, T.⁸

6
- 0038694866
- K. Orgassa, H. W. Schock and J. H. Werner, Thin Solid Films 431-432 (2003) 387
- (2003) Thin Solid Films , vol.431-432 , pp. 387
- Orgassa, K.¹ Schock, H.W.² Werner, J.H.³

7
- 84891371723
- New Orleans, Louisiana
- H. A. Al-Thani, F. S. Hasoon, M. Young, S. Asher, J. L. Alleman, M. M. Al-Jassim and D. L. Williamson, 29th IEEE PV Specialists Conf., New Orleans, Louisiana (2002).
- (2002) 29th IEEE PV Specialists Conf
- Al-Thani, H.A.¹ Hasoon, F.S.² Young, M.³ Asher, S.⁴ Alleman, J.L.⁵ Al-Jassim, M.M.⁶ Williamson, D.L.⁷

8
- 84868642807
- E. Gautron, M. Tomassini, L. Arzel and N. Barreau, Surf. Coat. Technol. 211 (2012) 29
- (2012) Surf. Coat. Technol , vol.211 , pp. 29
- Gautron, E.¹ Tomassini, M.² Arzel, L.³ Barreau, N.⁴

9
- 82755189426
- G. T. West and P. J. Kelly, Surf. Coat. Technol. 206 (2011) 1648
- (2011) Surf. Coat. Technol , vol.206 , pp. 1648
- West, G.T.¹ Kelly, P.J.²

10
- 33750510336
- M. Islam, O. T. Inal and J. R. Luke, J. App. Phys. 100 (2006) 084903
- (2006) J. App. Phys , vol.100 , pp. 084903
- Islam, M.¹ Inal, O.T.² Luke, J.R.³

11
- 40249097754
- M. Islam and O. T. Inal, J. Vac. Sci. Technol. A 26(2) (2008) 198
- (2008) J. Vac. Sci. Technol , vol.A26 , Issue.2 , pp. 198
- Islam, M.¹ Inal, O.T.²

12
- 17744379168
- L. Assmann, J. C. Bernede, A. Drici, C. Amory, E. Halgand and M. Morsli, Appl. Surf. Sci. 246 (2005) 159
- (2005) Appl. Surf. Sci , vol.246 , pp. 159
- Assmann, L.¹ Bernede, J.C.² Drici, A.³ Amory, C.⁴ Halgand, E.⁵ Morsli, M.⁶

13
- 34249103556
- Y. W. Yen, Y. L. Kuo, J. Y. Chen, C. Lee and C. Y. Lee, Thin Solid Films 515 (2007) 7209
- (2007) Thin Solid Films , vol.515 , pp. 7209
- Yen, Y.W.¹ Kuo, Y.L.² Chen, J.Y.³ Lee, C.⁴ Lee, C.Y.⁵

14
- 84891371302
- S.-Y. Kuo, L.-B. Chang, M.-J. Jeng, W.-T. Lin, Y.-T. Lu and S.-C. Hu, Res. Soc. Symp. Proc. 1123 (2009) P05-18
- (2009) Res. Soc. Symp. Proc , vol.23
- Kuo, S.-Y.¹ Chang, L.-B.² Jeng, M.-J.³ Lin, W.-T.⁴ Lu, Y.-T.⁵ Hu, S.-C.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.