Modeling of parasitic fringing capacitance in multifin trigate FinFETs

IEEE Transactions on Electron Devices

Volumn 60, Issue 5, 2013, Pages 1786-1789

  Lee, Kwang Won ^a   An, Tae Yoon ^a   Joo, So Yeon ^a   Kwon, Kee Won ^a   Kim, So Young ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Analytical model; FinFET; Multifin; Parasitic capacitance

Indexed keywords

CONFORMAL MAPPING TECHNIQUE; FIN NUMBERS; FINFET; FRINGING CAPACITANCE; MODEL FITTING; MULTIFIN; NONDIMENSIONALIZATION; PARASITIC CAPACITANCE;

ANALYTICAL MODELS; CONFORMAL MAPPING; FINS (HEAT EXCHANGE); INTEGRATED CIRCUITS; MODELS; MOSFET DEVICES;

CAPACITANCE;

EID: 84887054407     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2013.2252467     Document Type: Article

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