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Volumn 795, Issue , 2013, Pages 388-392

Microfluidic photomask design using CAD software for application in lab-on-chip biomedical nano diagnostics

Author keywords

AutoCAD; Biomedical; Critical dimension; Lab on chip; Microfluidic; Nano diagnostic; Photomask

Indexed keywords

AUTOCAD; BIOMEDICAL; CRITICAL DIMENSION; LAB-ON-CHIP; NANO DIAGNOSTIC;

EID: 84886261679     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.795.388     Document Type: Conference Paper
Times cited : (8)

References (8)
  • 1
    • 33748676880 scopus 로고    scopus 로고
    • Fast three-dimensional nanostructure fabrication by laser-assisted nanotransfer printing
    • B. Le Drogoff, B. Cui, and T. Veres, "Fast three-dimensional nanostructure fabrication by laser-assisted nanotransfer printing," Applied physics letters, vol. 89, pp. 113103-1, 2006.
    • (2006) Applied Physics Letters , vol.89 , pp. 113103-113111
    • Le Drogoff, B.1    Cui, B.2    Veres, T.3
  • 3
    • 0004668177 scopus 로고
    • Wavefront Engineering for Photolithography
    • D. L. Marc, "Wavefront Engineering for Photolithography", Physics Today, vol. 46, pp. 28-36, 1993.
    • (1993) Physics Today , vol.46 , pp. 28-36
    • Marc, D.L.1
  • 4
    • 0030697632 scopus 로고    scopus 로고
    • Fabrication of electrophoresis devices on quartz and glass substrates using a bonding with HF solution
    • Micro Electro Mechanical Systems, 1997. MEMS '97, Tenth Annual International Workshop on
    • H. Nakanishi, T. Nishimoto, N. Nakamura, S. Nagamachi, A. Arai, Y. Iwata, and Y. Mito, "Fabrication of electrophoresis devices on quartz and glass substrates using a bonding with HF solution," in Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop on, 1997, pp. 299-304.
    • (1997) Proceedings, IEEE , pp. 299-304
    • Nakanishi, H.1    Nishimoto, T.2    Nakamura, N.3    Nagamachi, S.4    Arai, A.5    Iwata, Y.6    Mito, Y.7
  • 6
    • 84886304967 scopus 로고    scopus 로고
    • Introduction to Semiconductor Manufacturing Technology: Prentice Hall
    • P. H. Xiao, Introduction to Semiconductor Manufacturing Technology: Prentice Hall, 2001.
    • (2001)
    • Xiao, P.H.1
  • 8
    • 84872578844 scopus 로고    scopus 로고
    • Micro/Nanowires Fabrication: Design Consideration for Reliable and Repeatability in Pattern Transfer
    • Fourth International Conference on Computational Intelligence
    • T. Adam and U. Hashim, "Micro/Nanowires Fabrication: Design Consideration for Reliable and Repeatability in Pattern Transfer," in Modelling and Simulation (CIMSiM), 2012 Fourth International Conference on Computational Intelligence, pp. 48-53.
    • (2012) Modelling and Simulation (CIMSiM) , pp. 48-53
    • Adam, T.1    Hashim, U.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.