Maskless and targeted creation of arrays of colour centres in diamond using focused ion beam technology

Physica Status Solidi (A) Applications and Materials Science

Volumn 210, Issue 10, 2013, Pages 2055-2059

  Lesik, Margarita ^a,b   Spinicelli, Piernicola ^a   Pezzagna, Sébastien ^a   Happel, Patrick ^a   Jacques, Vincent ^b   Salord, Olivier ^c   Rasser, Bernard ^c   Delobbe, Anne ^c   Sudraud, Pierre ^c   Tallaire, Alexandre ^d   Meijer, Jan ^e   Roch, Jean François ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b LABORATOIRE AIMÉ COTTON   (France)

^c 9052 Zwijnaarde   (France)

^d UNIVERSITÉ PARIS 13   (France)

^e UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

diamond; focused ion beam; ion implantation; nitrogen vacancy

Indexed keywords

ELECTRON CYCLOTRON RESONANCE PLASMA; FOCUSED ION BEAM TECHNOLOGY; HIGH RESOLUTION; NITROGEN IMPLANTATION; NITROGEN ION BEAM; NITROGEN IONS; NITROGEN VACANCIES; SINGLE DEFECT;

ATOMIC FORCE MICROSCOPY; COLOR CENTERS; ELECTRON BEAM LITHOGRAPHY; ELECTRON CYCLOTRON RESONANCE; FOCUSED ION BEAMS; ION IMPLANTATION; NITROGEN; SCANNING ELECTRON MICROSCOPY;

DIAMONDS;

EID: 84886088349     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201300102     Document Type: Article

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