Biomimetic artificial Si compound eye surface structures with broadband and wide-angle antireflection properties for Si-based optoelectronic applications

Nanoscale

Volumn 5, Issue 21, 2013, Pages 10455-10460

  Leem, Jung Woo ^a   Song, Young Min ^b   Yu, Jae Su ^a  

^a Kyung Hee University   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING PROCESS; HEXAGONAL SYMMETRY; PATTERNED MICROSTRUCTURES; SI-BASED OPTOELECTRONICS; SPECULAR REFLECTANCE; THERMAL DEWETTING; TOTAL REFLECTANCE; WAVELENGTH REGIONS;

BIOMIMETICS; DRY ETCHING; NANOSTRUCTURES; PHOTOLITHOGRAPHY; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS;

SILICON;

BIOMIMETIC MATERIAL; GOLD; NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; ELECTRONICS; PARTICLE SIZE; SURFACE PROPERTY; ULTRASTRUCTURE;

BIOMIMETIC MATERIALS; ELECTRONICS; GOLD; NANOSTRUCTURES; PARTICLE SIZE; SILICON; SURFACE PROPERTIES;

EID: 84885628950     PISSN: 20403364     EISSN: 20403372     Source Type: Journal    
DOI: 10.1039/c3nr02806b     Document Type: Article

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