메뉴 건너뛰기




Volumn 41, Issue 10, 2009, Pages 771-777

Investigation of geometrical effects of antireflective subwavelength grating structures for optical device applications

Author keywords

Antireflection; Effective medium theory; Nanostructure; Optical device; Subwavelength grating

Indexed keywords

ANTI-REFLECTION; ANTIREFLECTIVE; BROADBAND ANTIREFLECTION; DEVICE APPLICATION; EFFECTIVE MEDIUM THEORIES; EXTERNAL REFLECTION; FLAT SURFACES; GEOMETRICAL EFFECT; GRATING PERIODS; INTERNAL REFLECTIONS; REFLECTION REGIONS; RIGOROUS COUPLED WAVE ANALYSIS; SUB-WAVE LENGTH GRATING; SUBSTRATE MATERIAL; WAVELENGTH RANGES;

EID: 77956611809     PISSN: 03068919     EISSN: 1572817X     Source Type: Journal    
DOI: 10.1007/s11082-010-9390-2     Document Type: Article
Times cited : (16)

References (15)
  • 1
    • 0042045277 scopus 로고    scopus 로고
    • 4th edn. Addison Wesley, San Francisco
    • Hecht, E.: Optic, 4th edn. Addison Wesley, San Francisco (2002)
    • (2002) Optic
    • Hecht, E.1
  • 4
    • 0000645317 scopus 로고    scopus 로고
    • Broadband antireflection gratings fabricated upon silicon substrate
    • Kanamori, Y., Sasaki, M., Hane, K.: Broadband antireflection gratings fabricated upon silicon substrate. Opt. Lett. 24, 1422-1424 (1999)
    • (1999) Opt. Lett. , vol.24 , pp. 1422-1424
    • Kanamori, Y.1    Sasaki, M.2    Hane, K.3
  • 6
    • 0029769986 scopus 로고    scopus 로고
    • Design, fabrication and characterization of subwavelength periodic structures for semiconductor anti-reflection coating in the visible domain
    • Lalanne, P., Morris, G. M.: Design, fabrication and characterization of subwavelength periodic structures for semiconductor anti-reflection coating in the visible domain. Proc. SPIE 2776, 300-309 (1996)
    • (1996) Proc. SPIE , vol.2776 , pp. 300-309
    • Lalanne, P.1    Morris, G.M.2
  • 7
    • 0019586874 scopus 로고
    • Rigorous coupled-wave analysis of planar-grating diffraction
    • Moharam, M. G., Gaylord, T. K.: Rigorous coupled-wave analysis of planar-grating diffraction. J. Opt. Soc. Am. 71, 811-818 (1981)
    • (1981) J. Opt. Soc. Am. , vol.71 , pp. 811-818
    • Moharam, M.G.1    Gaylord, T.K.2
  • 8
    • 0020824090 scopus 로고
    • Three-dimensional vector coupled-wave analysis of planar-grating diffraction
    • Moharam, M. G., Gaylord, T. K.: Three-dimensional vector coupled-wave analysis of planar-grating diffraction. J. Opt. Soc. Am. 73, 1105-1112 (1983)
    • (1983) J. Opt. Soc. Am. , vol.73 , pp. 1105-1112
    • Moharam, M.G.1    Gaylord, T.K.2
  • 10
    • 67649379403 scopus 로고    scopus 로고
    • Closely packed and aspect-ratio controlled antireflection subwavelength gratings on GaAs using a lens like shape transfer
    • Song, Y. M., Bae, S. Y., Yu, J. S., Lee, Y. T.: Closely packed and aspect-ratio controlled antireflection subwavelength gratings on GaAs using a lens like shape transfer. Opt. Lett. 34, 1702-1704 (2009)
    • (2009) Opt. Lett. , vol.34 , pp. 1702-1704
    • Song, Y.M.1    Bae, S.Y.2    Yu, J.S.3    Lee, Y.T.4
  • 11
    • 79956038834 scopus 로고    scopus 로고
    • Dynamic etching of silicon for broadband antireflection applications
    • Striemer, C. C., Fauchet, P. M.: Dynamic etching of silicon for broadband antireflection applications. Appl. Phys. Lett. 81, 2980-2982 (2002)
    • (2002) Appl. Phys. Lett. , vol.81 , pp. 2980-2982
    • Striemer, C.C.1    Fauchet, P.M.2
  • 12
    • 36849059619 scopus 로고    scopus 로고
    • Templated fabrication of large area subwavelength antireflection gratings on silicon
    • Sun, C.-H., Min, W.-L., Linn, N. C., Jiang, P., Jiang, B.: Templated fabrication of large area subwavelength antireflection gratings on silicon. Appl. Phys. Lett. 91, 231105 (2007)
    • (2007) Appl. Phys. Lett. , vol.91 , pp. 231105
    • Sun, C.-H.1    Min, W.-L.2    Linn, N.C.3    Jiang, P.4    Jiang, B.5
  • 13
    • 55349105803 scopus 로고    scopus 로고
    • Biomimetic subwavelength antireflective gratings on GaAs
    • Sun, C.-H., Ho, B. J., Jiang, P., Jiang, B.: Biomimetic subwavelength antireflective gratings on GaAs. Opt. Lett. 33, 2224-2226 (2008)
    • (2008) Opt. Lett. , vol.33 , pp. 2224-2226
    • Sun, C.-H.1    Ho, B.J.2    Jiang, P.3    Jiang, B.4
  • 14
    • 0040799916 scopus 로고    scopus 로고
    • Nanophase-separated polymer films as high-performance antireflection coatings
    • Walheim, S., Schaffer, E., Mlynek, J., Steiner, U.: Nanophase-separated polymer films as high-performance antireflection coatings. Science 283, 520-522 (1999)
    • (1999) Science , vol.283 , pp. 520-522
    • Walheim, S.1    Schaffer, E.2    Mlynek, J.3    Steiner, U.4
  • 15
    • 0942300038 scopus 로고    scopus 로고
    • Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff
    • Yu, Z., Gao, H., Wu, W., Ge, H., Chou, S. T.: Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff. J. Vac. Sci. Technol. B 21, 2874-2877 (2003)
    • (2003) J. Vac. Sci. Technol. B. , vol.21 , pp. 2874-2877
    • Yu, Z.1    Gao, H.2    Wu, W.3    Ge, H.4    Chou, S.T.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.