A large area bimaterial sheet of piezoelectric nanogenerators for energy harvesting: Effect of RF sputtering on ZnO nanorod

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2236-2241

  Chang, Chun Jie ^a   Lee, Yi Huan ^a   Dai, Chi An ^a   Hsiao, Chih Chung ^a   Chen, Shuh Heng ^b   Nurmalasari, Ni Putu Dewi ^b   Chen, Jyh Chien ^d   Cheng, Yao Yi ^e   Shih, Wen Pin ^a   Chang, Pei Zen ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b TAIWAN TEXTILE RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^d NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^e NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Current generating nanodevices; Energy harvesting; Nanodevice; RF magnetron sputtering system; ZnO nanorods

Indexed keywords

BI-MATERIAL; CRYSTALLINITIES; ELECTRICAL CURRENT; HYDROTHERMAL GROWTH; MECHANICAL ENERGIES; NANO DEVICE; NANO-DEVICES; NANOROD MORPHOLOGIES; NUMBER DENSITY; POLYURETHANE FILMS; PREFERRED ORIENTATIONS; PROCESSING PARAMETERS; RADIO-FREQUENCY SPUTTERING; RF-MAGNETRON SPUTTERING; RF-SPUTTERING; SEED LAYER; SEEDING PROCESS; SPUTTERING POWER; SPUTTERING TIME; TARGET TYPE; WELL-ALIGNED; WURTZITE STRUCTURE; ZNO; ZNO NANOPARTICLES; ZNO NANOROD; ZNO NANOROD ARRAYS;

CRYSTAL ORIENTATION; GOLD; INDIUM COMPOUNDS; ITO GLASS; MAGNETRON SPUTTERING; NANOPARTICLES; NANORODS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OPTIMIZATION; PIEZOELECTRICITY; TIN; TIN OXIDES; ZINC OXIDE; ZINC SULFIDE;

ENERGY HARVESTING;

EID: 79960073495     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.010     Document Type: Conference Paper

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