Thermoelectric energy harvester fabricated by Stepper

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1242-1244

  Su, J ^a   Vullers, Ruud J M ^a   Goedbloed, M ^a   van Andel, Y ^a   Leonov, V ^b   Wang, Z ^b,c  

^a HOLST CENTRE   (Netherlands)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Large topography; MEMS; Micro machining; Stepper; Thermal energy harvester; Thermocouples

Indexed keywords

BODY AREA NETWORK; ENERGY HARVESTER; HEAT FLOWS; HUMAN BODIES; LARGE TOPOGRAPHY; LOW-THERMAL GRADIENTS; MICROMACHINED; STEPPER; THERMOELECTRIC ENERGY; THERMOELECTRIC GENERATORS; WIRELESS SENSOR NODE;

ELECTRIC NETWORK SYNTHESIS; ENERGY CONVERSION; HARVESTERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSOR NODES; TELECOMMUNICATION EQUIPMENT; THERMOCOUPLES; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THERMOMETERS; WASTE HEAT;

ENERGY HARVESTING;

EID: 76949084250     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.135     Document Type: Article

References (7)

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