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Volumn , Issue , 2008, Pages

Design and fabrication of a multifunctional scanning probe with integrated tip changer for fully automated nanofabrication

Author keywords

[No Author keywords available]

Indexed keywords


EID: 84884928693     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (11)
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    • 33845548747 scopus 로고    scopus 로고
    • Electrical, thermal, and mechanical characterization of silicon microcantilever heaters
    • DOI 10.1109/JMEMS.2006.886020
    • Lee, J., T. Beechem, T.L. Wright, B.A. Nelson, S. Graham, and W.P. King. 2006. Electrical, thermal, and mechanical characterization of silicon microcantilever heaters. Journal of Microelectromechanical Systems. 15: 1644-1655. (Pubitemid 44921783)
    • (2006) Journal of Microelectromechanical Systems , vol.15 , Issue.6 , pp. 1644-1655
    • Lee, J.1    Beechem, T.2    Wright, T.L.3    Nelson, B.A.4    Graham, S.5    King, W.P.6
  • 7
    • 33646722687 scopus 로고    scopus 로고
    • Pick-and-place nanomanipulation using microfabricated grippers
    • DOI 10.1088/0957-4484/17/10/002, PII S0957448406184998
    • Molhave, K., T. Wich, A. Kortschack, and P. Boggled. 2006. Pick-and-place nanomanipulation using microfabricated grippers. Nanotechnology. 17: 2434-2441. (Pubitemid 43745776)
    • (2006) Nanotechnology , vol.17 , Issue.10 , pp. 2434-2441
    • Molhave, K.1    Wich, T.2    Kortschack, A.3    Boggild, P.4
  • 9
    • 33749554122 scopus 로고    scopus 로고
    • Prentice Hall, Upper Saddle River, New Jersey
    • Liu, C. 2006. Foundations of MEMS. Prentice Hall, Upper Saddle River, New Jersey.
    • (2006) Foundations of MEMS
    • Liu, C.1
  • 10
    • 0033096840 scopus 로고    scopus 로고
    • Analysis and design of polysilicon thermal flexure actuator
    • Huang, Q-A. and Lee, N. K. S. Analysis and design of polysilicon thermal flexure actuator, J. Micromech. Micron.; 1999; 9; 64-70.
    • (1999) J. Micromech. Micron. , vol.9 , pp. 64-70
    • Huang, Q.-A.1    Lee, N.K.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.