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Volumn 36, Issue 6, 2000, Pages 3997-4004
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Thermal proximity imaging of hard-disk substrates
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Author keywords
Defect detection; Defect inspection; Disk drive; HDI; Thermal imaging
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Indexed keywords
FINITE ELEMENT METHOD;
HARD DISK STORAGE;
INSPECTION;
MAGNETORESISTANCE;
MATHEMATICAL MODELS;
SUBSTRATES;
DEFECT DETECTION;
DEFECT INSPECTION;
HARD DISK SUBSTRATES;
THERMAL PROXIMITY SENSING;
INFRARED IMAGING;
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EID: 0034312669
PISSN: 00189464
EISSN: None
Source Type: Journal
DOI: 10.1109/20.914353 Document Type: Article |
Times cited : (4)
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References (9)
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