Complete wavefront and polarization control for ultrashort-pulse laser microprocessing

Optics Express

Volumn 21, Issue 18, 2013, Pages 21198-21207

  Allegre, O J ^a   Jin, Y ^a   Perrie, W ^a   Ouyang, J ^a   Fearon, E ^a   Edwardson, S P ^a   Dearden, G ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTHAL POLARIZATION; COMPUTER GENERATED HOLOGRAMS; LASER MICRO PROCESSING; LASER-INDUCED PERIODIC SURFACE STRUCTURES; MULTIPLE FIRST-ORDER; POLARIZATION CONTROL; SPATIAL LIGHT MODULATORS; STATE OF POLARIZATION;

COMPUTER GENERATED HOLOGRAPHY; LIGHT MODULATORS; VORTEX FLOW; WAVEFRONTS;

POLARIZATION;

EID: 84884580684     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.021198     Document Type: Article

References (32)

1. R. Le Harzic, D. Breitling, M. Weikert, S. Sommer, C. Föhl, S. Valette, C. Donnet, E. Audouard, and F. Dausinger, "Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps," Appl. Surf. Sci. 249(1-4), 322-331 (2005).
2. P. S. Banks, M. D. Feit, A. M. Rubenchik, B. C. Stuart, and M. D. Perry, "Material effects in ultra-short pulse laser drilling of metals," Appl. Phys., A Mater. Sci. Process. 69(7), S377-S380 (1999).
3. D. Breitling, C. Föhl, F. Dausinger, T. Kononenko, and V. Konov, "Drilling of metals", in Femtosecond Technology for Technical and Medical Applications, Topics Appl. Phys. 96, 131-156 (Springer-Verlag, 2004).
4. D. Breitling, A. Ruf, and F. Dausinger, "Fundamental aspects in machining of metals with short and ultrashort laser pulses," Proc. SPIE 5339, 49-63 (2004).
5. N. Sudani, K. Venkatakrishnan, and B. Tan, "Laser singulation of thin wafer: die strength and surface roughness analysis of 80μm silicon dice," Opt. Lasers Eng. 47(7-8), 850-854 (2009).
6. G. Račiukaitis, S. Grubinskas, P. Gecys, and M. Gedvilas, "Selectiveness of laser processing due to energy coupling localization: case of thin film solar cell scribing," Appl. Phys., A Mater. Sci. Process. 112(1), 93-98 (2013).
7. D. Liu, Z. Kuang, W. Perrie, P. J. Scully, A. Baum, S. P. Edwardson, E. Fearon, G. Dearden, and K. G. Watkins, "High-speed uniform parallel 3D refractive index micro-structuring of poly(methyl methacrylate) for volume phase gratings," Appl. Phys. B 101(4), 817-823 (2010).
8. Y. Bellouard, A. Champion, B. Lenssen, M. Matteucci, A. Schaap, M. Beresna, C. Corbari, M. Gecevicius, P. Kazansky, O. Chappuis, M. Kral, R. Clavel, F. Barrot, J. M. Breguet, Y. Mabillard, S. Bottinelli, M. Hopper, C. Hoenninger, E. Mottay, and J. Lopez, "The Femtoprint Project," JLMN 7(1), 1-10 (2012).
9. M. Rioux, R. Tremblay, and P. A. Bélanger, "Linear, annular, and radial focusing with axicons and applications to laser machining," Appl. Opt. 17(10), 1532-1536 (1978).
10. N. Sanner, N. Huot, E. Audouard, C. Larat, and J. P. Huignard, "Direct ultrafast laser micro-structuring of materials using programmable beam shaping," Opt. Lasers Eng. 45(6), 737-741 (2007).
11. J. Hamazaki, R. Morita, K. Chujo, Y. Kobayashi, S. Tanda, and T. Omatsu, "Optical-vortex laser ablation," Opt. Express 18(3), 2144-2151 (2010).
12. M. Duocastella and C. B. Arnold, "Bessel and annular beams for materials processing," Laser Photonics Rev. 6(5), 607-621 (2012).
13. N. J. Jenness, K. D. Wulff, M. S. Johannes, M. J. Padgett, D. G. Cole, and R. L. Clark, "Three-dimensional parallel holographic micropatterning using a spatial light modulator," Opt. Express 16(20), 15942-15948 (2008).
14. Y. Hayasaki, T. Sugimoto, A. Takita, and N. Nishida, "Variable holographic femtosecond laser processing by use of a spatial light modulator," Appl. Phys. Lett. 87(3), 031101 (2005).
15. Z. Kuang, W. Perrie, D. Liu, S. Edwardson, J. Cheng, G. Dearden, and K. Watkins, "Diffractive multi-beam surface micro-processing using 10 ps laser pulses," Appl. Surf. Sci. 255(22), 9040-9044 (2009).
16. S. Hasegawa and Y. Hayasaki, "Polarization distribution control of parallel femtosecond pulses with spatial light modulators," Opt. Express 21(11), 12987-12995 (2013).
17. O. J. Allegre, W. Perrie, K. Bauchert, D. Liu, S. P. Edwardson, G. Dearden, and K. G. Watkins, "Real-time control of polarisation in ultra-short-pulse laser micro-machining," Appl. Phys., A Mater. Sci. Process. 107(2), 445-454 (2012).
18. S. Nolte, C. Momma, G. Kamlage, A. Ostendorf, C. Fallnich, F. Von Alvensleben, and H. Welling, "Polarization effects in ultrashort-pulse laser drilling," Appl. Phys., A Mater. Sci. Process. 68(5), 563-567 (1999).
19. K. Venkatakrishnan, B. Tan, P. Stanley, and N. R. Sivakumar, "The effect of polarization on ultrashort pulsed laser ablation of thin metal films," J. Appl. Phys. 92(3), 1604-1607 (2002).
20. V. G. Niziev and A. V. Nesterov, "Influence of beam polarization on laser cutting efficiency," J. Phys. D Appl. Phys. 32(13), 1455-1461 (1999).
21. R. Weber, A. Michalowski, M. Abdou-Ahmed, V. Onuseit, V. Rominger, M. Kraus, and T. Graf, "Effects of radial and tangential polarization in laser material processing," Phys. Procedia 12, 21-30 (2011).
22. M. Meier, V. Romano, and T. Feurer, "Material processing with pulsed radially and azimuthally polarized laser radiation," Appl. Phys., A Mater. Sci. Process. 86(3), 329-334 (2007).
23. K. Venkatakrishnan and B. Tan, "Interconnect microvia drilling with a radially polarized laser beam," J. Micromech. Microeng. 16(12), 2603-2607 (2006).
24. M. R. Beversluis, L. Novotny, and S. J. Stranick, "Programmable vector point-spread function engineering," Opt. Express 14(7), 2650-2656 (2006).
25. J. Qi, W. Sun, J. Liao, Y. Nie, X. Wang, J. Zhang, X. Liu, H. Jia, M. Lu, S. Chen, J. Liu, J. Yang, J. Tan, and X. Li, "Generation and analysis of both in-phase and out-phase radially polarized femtosecond-pulse beam," Opt. Eng. 52(2), 024201 (2013).
26. O. J. Allegre, W. Perrie, S. P. Edwardson, G. Dearden, and K. G. Watkins, "Laser microprocessing of steel with radially and azimuthally polarized femtosecond vortex pulses," J. Opt. 14(8), 085601 (2012).
27. Z. Guosheng, P. M. Fauchet, and A. E. Siegman, "Growth of spontaneous periodic surface structures on solids during laser illumination," Phys. Rev. B 26(10), 5366-5381 (1982).
28. Q. Z. Zhao, S. Malzer, and L. J. Wang, "Formation of subwavelength periodic structures on tungsten induced by ultrashort laser pulses," Opt. Lett. 32(13), 1932-1934 (2007).
29. M. Beresna, M. Gecevicius, P. G. Kazansky, and T. Gertus, "Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass," Appl. Phys. Lett. 98(20), 201101 (2011).
30. U. Klug, J. F. Dusing, T. Sato, K. Washio, and R. Kling, "Polarization converted laser beams for micromachining applications," Proc. SPIE 7590, 759006, 759006-8 (2010).
31. K. Lou, S. X. Qian, X. L. Wang, Y. Li, B. Gu, C. Tu, and H. T. Wang, "Two-dimensional microstructures induced by femtosecond vector light fields on silicon," Opt. Express 20(1), 120-127 (2012).
32. G. Wu, Q. Lou, J. Zhou, J. Dong, and Y. Wei, "Focal shift in focused radially polarized ultrashort pulsed laser beams," Appl. Opt. 46(25), 6251-6255 (2007).