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Volumn 20, Issue 1, 2012, Pages 120-127

Two-dimensional microstructures induced by femtosecond vector light fields on silicon

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; POLARIZATION; TWO DIMENSIONAL;

EID: 84855464756     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.000120     Document Type: Article
Times cited : (92)

References (30)
  • 1
    • 65649130692 scopus 로고    scopus 로고
    • Cylindrical vector beams: From mathematical concepts to applications
    • Q. Zhan, "Cylindrical vector beams: from mathematical concepts to applications," Adv. Opt. Photon. 1, 1-57 (2009).
    • (2009) Adv. Opt. Photon. , vol.1 , pp. 1-57
    • Zhan, Q.1
  • 3
    • 40149098122 scopus 로고    scopus 로고
    • Generation of arbitrary vector beams with a spatial light modulator and a common path interferometric arrangement
    • X. L. Wang, J. Ding, W. J. Ni, C. S. Guo, and H. T. Wang, "Generation of arbitrary vector beams with a spatial light modulator and a common path interferometric arrangement," Opt. Lett. 32, 3549-3551 (2007). (Pubitemid 351328339)
    • (2007) Optics Letters , vol.32 , Issue.24 , pp. 3549-3551
    • Wang, X.-L.1    Ding, J.2    Ni, W.-J.3    Guo, C.-S.4    Wang, H.-T.5
  • 4
    • 77952725338 scopus 로고    scopus 로고
    • A new type of vector fields with hybrid states of polarization
    • X. L. Wang, Y. N. Li, J. Chen, C. S. Guo, J. P. Ding, and H. T. Wang, "A new type of vector fields with hybrid states of polarization," Opt. Express 18, 10786-10795 (2010).
    • (2010) Opt. Express , vol.18 , pp. 10786-10795
    • Wang, X.L.1    Li, Y.N.2    Chen, J.3    Guo, C.S.4    Ding, J.P.5    Wang, H.T.6
  • 5
    • 67649233261 scopus 로고    scopus 로고
    • Singular optics: Optical vortices and polarization singularities
    • M. R. Dennis, K. O'Holleran, and M. J. Padgett, "Singular optics: Optical vortices and polarization singularities," Prog. Opt. 53, 293-363 (2009).
    • (2009) Prog. Opt. , vol.53 , pp. 293-363
    • Dennis, M.R.1    O'holleran, K.2    Padgett, M.J.3
  • 6
    • 0346686255 scopus 로고    scopus 로고
    • Sharper focus for a radially polarized light beam
    • R. Dorn, S. Quabis, and G. Leuchs, "Sharper focus for a radially polarized light beam," Phys. Rev. Lett. 91, 233901 (2003).
    • (2003) Phys. Rev. Lett. , vol.91 , pp. 233901
    • Dorn, R.1    Quabis, S.2    Leuchs, G.3
  • 7
    • 0037440168 scopus 로고    scopus 로고
    • Ultrasmall focusing spot with a long depth of focus based on polarization and phase modulation
    • C. C. Sun and C. K. Liu, "Ultrasmall focusing spot with a long depth of focus based on polarization and phase modulation," Opt. Lett. 28, 99-101 (2003).
    • (2003) Opt. Lett. , vol.28 , pp. 99-101
    • Sun, C.C.1    Liu, C.K.2
  • 9
    • 48849100532 scopus 로고    scopus 로고
    • Creation of a needle of longitudinally polarized light in vacuum using binary optics
    • H. F. Wang, L. P. Shi, B. Lukyanchuk, C. Sheppard, and C. T. Chong, "Creation of a needle of longitudinally polarized light in vacuum using binary optics," Nat. Photon. 2, 501-505 (2008).
    • (2008) Nat. Photon. , vol.2 , pp. 501-505
    • Wang, H.F.1    Shi, L.P.2    Lukyanchuk, B.3    Sheppard, C.4    Chong, C.T.5
  • 10
    • 79952940963 scopus 로고    scopus 로고
    • Revealing local field structure of focused ultrashort pulses
    • C. Hnatovsky, V. Shvedov, W. Krolikowski, and A. Rode, "Revealing local field structure of focused ultrashort pulses," Phys. Rev. Lett. 106, 123901 (2011).
    • (2011) Phys. Rev. Lett. , vol.106 , pp. 123901
    • Hnatovsky, C.1    Shvedov, V.2    Krolikowski, W.3    Rode, A.4
  • 11
    • 0942289993 scopus 로고    scopus 로고
    • Self-organized nanogratings in glass irradiated by ultrashort light pluses
    • Y. Shimotsuma, P. G. Kazansky, J. R. Qiu, K. Hirao, "Self-organized nanogratings in glass irradiated by ultrashort light pluses," Phys. Rev. Lett. 91, 247405 (2003).
    • (2003) Phys. Rev. Lett. , vol.91 , pp. 247405
    • Shimotsuma, Y.1    Kazansky, P.G.2    Qiu, J.R.3    Hirao, K.4
  • 12
    • 33646743149 scopus 로고    scopus 로고
    • Efficiency of silicon micromachining by femtosecond laser pulses in ambient air
    • D. J. Hwang and C. P. Grigoropoulos, and T. Y. Choi, "Efficiency of silicon micromachining by femtosecond laser pulses in ambient air," J. Appl. Phys. 99, 083101 (2006).
    • (2006) J. Appl. Phys. , vol.99 , pp. 083101
    • Hwang, D.J.1    Grigoropoulos, C.P.2    Choi, T.Y.3
  • 13
    • 78149319446 scopus 로고    scopus 로고
    • Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation
    • K. Okamuro, M. Hashida, Y. Miyasaka, Y. Ikuta, S. Tokita, and S. Sakabe, "Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation," Phys. Rev. B 82, 165417 (2010).
    • (2010) Phys. Rev. B , vol.82 , pp. 165417
    • Okamuro, K.1    Hashida, M.2    Miyasaka, Y.3    Ikuta, Y.4    Tokita, S.5    Sakabe, S.6
  • 14
    • 34548663127 scopus 로고    scopus 로고
    • Periodic surface structures on gallium phosphide after irradiation with 150fs-7ns laser pulses at 800nm
    • E. M. Hsu, T. H. R. Crawford, H. F. Tiedje and H. K. Haugen, "Periodic surface structures on gallium phosphide after irradiation with 150fs-7ns laser pulses at 800nm," Appl. Phys. Lett. 91, 111102 (2007).
    • (2007) Appl. Phys. Lett. , vol.91 , pp. 111102
    • Hsu, E.M.1    Crawford, T.H.R.2    Tiedje, H.F.3    Haugen, H.K.4
  • 15
    • 73849145396 scopus 로고    scopus 로고
    • Origin of laser-induced near-subwavelength ripples: Interference between surface plasmons and incident laser
    • M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, "Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser," ACS Nano. 3, 4062-4070 (2009).
    • (2009) ACS Nano. , vol.3 , pp. 4062-4070
    • Huang, M.1    Zhao, F.L.2    Cheng, Y.3    Xu, N.S.4    Xu, Z.Z.5
  • 16
    • 71749118353 scopus 로고    scopus 로고
    • On the role of surface Plasmon polaritons in the formation of laserinduced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses
    • J. Bonse, A. Rosenfeld, and J. Krüger, "On the role of surface Plasmon polaritons in the formation of laserinduced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses," J. Appl. Phys. 106, 104910 (2009).
    • (2009) J. Appl. Phys. , vol.106 , pp. 104910
    • Bonse, J.1    Rosenfeld, A.2    Krüger, J.3
  • 17
    • 60349128232 scopus 로고    scopus 로고
    • Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse
    • S. Sakabe, M. Hashida, S. Tokuta, S. Namba, and K. Okamuro, "Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse," Phys. Rev. B 79, 033409 (2009).
    • (2009) Phys. Rev. B , vol.79 , pp. 033409
    • Sakabe, S.1    Hashida, M.2    Tokuta, S.3    Namba, S.4    Okamuro, K.5
  • 18
    • 77955683830 scopus 로고    scopus 로고
    • Long- and short-period nanostructure formation on semiconductor surfaces at different ambient conditions
    • R. A. Ganeev, M. Baba, T. Ozaki, and H. Kuroda, "Long- and short-period nanostructure formation on semiconductor surfaces at different ambient conditions," J. Opt. Soc. Am. B 27, 1077-1082 (2010).
    • (2010) J. Opt. Soc. Am. B , vol.27 , pp. 1077-1082
    • Ganeev, R.A.1    Baba, M.2    Ozaki, T.3    Kuroda, H.4
  • 19
    • 79959415721 scopus 로고    scopus 로고
    • Formation of periodic nanoripples on silicon and Germanium induced by femtosecond laser pulses
    • R. L. Harzic, D. D. Sauer, M. Neumeier, M. Epple, H. Zimmermann, and F. Stracke, "Formation of periodic nanoripples on silicon and Germanium induced by femtosecond laser pulses," Phys. Procedia 12, 29-36 (2011).
    • (2011) Phys. Procedia , vol.12 , pp. 29-36
    • Harzic, R.L.1    Sauer, D.D.2    Neumeier, M.3    Epple, M.4    Zimmermann, H.5    Stracke, F.6
  • 20
    • 80052795100 scopus 로고    scopus 로고
    • The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations
    • C. Wang, H. B. Huo, M. Johnson, M. Shen, and E. Mazur, "The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations," Nanotechnology 21, 075304 (2010).
    • (2010) Nanotechnology , vol.21 , pp. 075304
    • Wang, C.1    Huo, H.B.2    Johnson, M.3    Shen, M.4    Mazur, E.5
  • 23
    • 77955418708 scopus 로고    scopus 로고
    • The ripples and nanoparticles on silicon irradiated by femtosecond laser
    • Y. H. Han and S. L. Qu, "The ripples and nanoparticles on silicon irradiated by femtosecond laser," Chem. Phys. Lett. 495, 241-244 (2010).
    • (2010) Chem. Phys. Lett. , vol.495 , pp. 241-244
    • Han, Y.H.1    Qu, S.L.2
  • 25
    • 34248330426 scopus 로고    scopus 로고
    • Two-photon absorption and kerr coefficients of silicon for 850-2200nm
    • A. D. Bristow, N. Rotenberg, and H. M. V. Driel, "Two-photon absorption and kerr coefficients of silicon for 850-2200nm," Appl. Phys. Lett. 90, 191104 (2007).
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 191104
    • Bristow, A.D.1    Rotenberg, N.2    Driel, H.M.V.3
  • 26
    • 78049526505 scopus 로고    scopus 로고
    • Microdrilling in steel using ultrashort pulsed laser beams with radial and azimuthal polarization
    • M. Kraus, M. A. Ahmed, A. Michalowski, A. Voss, R.Weber, and T. Graf, "Microdrilling in steel using ultrashort pulsed laser beams with radial and azimuthal polarization," Opt. Express 18, 22305-22313 (2010).
    • (2010) Opt. Express , vol.18 , pp. 22305-22313
    • Kraus, M.1    Ahmed, M.A.2    Michalowski, A.3    Voss, A.4    Weber, R.5    Graf, T.6
  • 27
    • 33846105902 scopus 로고    scopus 로고
    • Interconnect microvia drilling with a radially polarized laser beam
    • DOI 10.1088/0960-1317/16/12/013, PII S0960131706270566, 013
    • K. Venkatakrishnan and B. Tan, "Interconnect microvia drilling with a radially polarized laser beam," J. Micromech. Microeng. 16, 2603-2607 (2006). (Pubitemid 46069529)
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , Issue.12 , pp. 2603-2607
    • Venkatakrishnan, K.1    Tan, B.2
  • 28
    • 79956117479 scopus 로고    scopus 로고
    • Fabrication of novel structures on silicon with femtosecond laser pulses
    • W. C. Shen, C. W. Cheng, M. C. Yang, Y. Kozawa, and S. Sato, "Fabrication of novel structures on silicon with femtosecond laser pulses," J. Laser Micro/Nanoeng. 5, 229-232 (2010).
    • (2010) J. Laser Micro/Nanoeng. , vol.5 , pp. 229-232
    • Shen, W.C.1    Cheng, C.W.2    Yang, M.C.3    Kozawa, Y.4    Sato, S.5
  • 29
    • 0000499787 scopus 로고
    • Femtosecond pulses in the focal region of lenses
    • M. Kempe and W. Rudolph, "Femtosecond pulses in the focal region of lenses," Phys. Rev. A 48, 4721-4729 (1993).
    • (1993) Phys. Rev. A , vol.48 , pp. 4721-4729
    • Kempe, M.1    Rudolph, W.2
  • 30
    • 0242610819 scopus 로고    scopus 로고
    • Three-dimensional light distribution near the focus of a tightly focused beam of few-cycle optical pulses
    • K. M. Romallosa, J. Bantang, and C. Saloma, "Three-dimensional light distribution near the focus of a tightly focused beam of few-cycle optical pulses," Phys. Rev. A 68, 033812 (2003).
    • (2003) Phys. Rev. A , vol.68 , pp. 033812
    • Romallosa, K.M.1    Bantang, J.2    Saloma, C.3


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