Polarization converted laser beams for micromachining applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7590, Issue , 2010, Pages

  Klug, Ulrich ^a   Düsing, Jan F ^a   Sato, Takashi ^b   Washio, Kunihiko ^c   Kling, Rainer ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b Photonic Lattice Incorporated   (Japan)

^c Paradigm Laser Research Limited   (Japan)

Author keywords

fs laser; LIPSS; ps laser; Ripples; Subwavelength periodic patterns

Indexed keywords

AZIMUTHAL POLARIZATION; BEAM PROPAGATION; FS-LASER; HALF-WAVE; PERIODIC PATTERN; POLARIZATION STATE; PROCESS DEVELOPMENT; RIPPLE STRUCTURE; SUB-PATTERNS; SUB-WAVELENGTH; ULTRASHORT LASER PULSE;

COMPOSITE MICROMECHANICS; LASER BEAMS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; POLARIZATION; PULSED LASER APPLICATIONS;

SEMICONDUCTOR LASERS;

EID: 77951531685     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.842141     Document Type: Conference Paper

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