Integration of microfluidics with grating coupled silicon photonic sensors by one-step combined photopatterning and molding of OSTE

Optics Express

Volumn 21, Issue 18, 2013, Pages 21293-21298

  Errando Herranz, Carlos ^a,b   Saharil, Farizah ^a   Romero, Albert Mola ^a,c   Sandström, Niklas ^a   Shafagh, Reza Zandi ^a   Van Der Wijngaart, Wouter ^a   Haraldsson, Tommy ^a   Gylfason, Kristinn B ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UNIVERSITAT POLITÈCNICA DE VALÈNCIA   (Spain)

^c UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; PHOTONIC DEVICES; REFRACTOMETERS; SENSORS;

INTEGRATION METHOD; MANUFACTURING CHALLENGES; MICROFLUIDIC PACKAGING; PHOTONIC WAVEGUIDES; POLYMER MICROFLUIDICS; REFRACTIVE INDEX MEASUREMENT; RING RESONATOR SENSORS; WAFER-LEVEL PRODUCTION;

MICROFLUIDICS;

EID: 84884552942     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.21.021293     Document Type: Article

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