High-resolution micropatterning of off-stochiometric thiol-enes (OSTE) via a novel lithography mechanism

Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012

Volumn , Issue , 2012, Pages 225-227

  Karlsson, J Mikael ^a   Carlborg, Carl Fredrik ^a   Sakaril, Farizali ^a   Forsberg, Fredrik ^a   Niklaus, Frank ^a   Van Der Wijiigaart, Wouter ^a   Haraldssou, Tommy ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Lithography; Microfabrication; Microfluidics; Micropatteniing; Off stoichiometry tliiol ene; OSTE

Indexed keywords

ASPECT RATIO; CHEMICAL BONDS; FLUIDIC DEVICES; LITHOGRAPHY; MECHANICAL PROPERTIES; MICROFABRICATION; MICROFLUIDICS; PHOTOLITHOGRAPHY; STOICHIOMETRY;

FABRICATION METHOD; HIGH-ASPECT RATIO; MECHANICAL MACHINING; MICRO PATTERNING; MICRO-FLUIDIC DEVICES; MICROPATTENIING; OFF-STOICHIOMETRY TLIIOL-ENE; OSTE;

POLYMERS;

EID: 84891720517     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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