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Volumn 583, Issue , 2014, Pages 111-115
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Enhanced thermoelectric properties of thermal treated Sb2Te 3 thin films
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Author keywords
Annealing temperature; Oxygen incorporation; Radio frequency sputtering; Theromoelectric properties
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Indexed keywords
ANNEALING;
ANTIMONY COMPOUNDS;
MAGNETRON SPUTTERING;
SILICA;
TELLURIUM COMPOUNDS;
THERMAL CONDUCTIVITY;
THERMOELECTRIC EQUIPMENT;
THIN FILMS;
ANNEALING TEMPERATURES;
COMPOSITIONAL STABILITY;
OXYGEN INCORPORATION;
RADIO FREQUENCY SPUTTERING;
RF-MAGNETRON SPUTTERING;
THERMOELECTRIC FIGURE OF MERIT;
THERMOELECTRIC PROPERTIES;
THEROMOELECTRIC PROPERTIES;
ATMOSPHERIC TEMPERATURE;
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EID: 84884306426
PISSN: 09258388
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jallcom.2013.08.164 Document Type: Article |
Times cited : (34)
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References (23)
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