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Applied Physics Letters

Volumn 103, Issue 9, 2013, Pages

Planar elliptical solid immersion lens based on a Cartesian oval

(2) McCloskey, D a Donegan, J F a

a TRINITY COLLEGE DUBLIN (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTIVE NUMERICAL APERTURE; FULL WIDTH HALF MAXIMUM; MICROSCOPE OBJECTIVE; NUMERICAL APERTURE; OPTICAL CHARACTERIZATION; SOLID IMMERSION LENS; TWO DIMENSIONAL FINITE ELEMENT METHOD; ULTRAVIOLET LITHOGRAPHY;

IMAGING TECHNIQUES;

OPTICAL DATA STORAGE;

EID: 84884185639 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4818781 Document Type: Article

Times cited : (9)

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