Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens

Applied Physics Letters

Volumn 75, Issue 26, 1999, Pages 4064-4066

  Wu, Qiang ^a   Feke, G D ^a   Grober, Robert D ^a   Ghislain, L P ^b  

^a Yale University   (United States)

^b Digital Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000243854     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125537     Document Type: Article

References (21)

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20. We have calibrated the system at 546 nm using a calibration grating and found that the magnification of our SIL is within 1% of the theoretical value. We, therefore, use the known refractive index to calibrate the length scale in each SIL image at its respective wavelength.
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