Miniature planar solid immersion mirror with focused spot less than a quarter wavelength

Optics Express

Volumn 13, Issue 18, 2005, Pages 7189-7197

  Challener, William A ^a   Mihalcea, Christophe ^a   Peng, Chubing ^a   Pelhos, Kalman ^a  

^a SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROOPTICS; MINIATURE INSTRUMENTS; THIN FILMS;

INTEGRATED CIRCUIT PROCESSING; MICROOPTICAL PLANAR WAVEGUIDE; MINIATURE PLANAR SOLID IMMERSION MIRROR; SCANNING NEAR FIELD OPTICAL MICROSCOPE IMAGES;

MIRRORS;

EID: 24944533499     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OPEX.13.007189     Document Type: Article

References (17)

1. E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, and R. L. Kostelak, "Breaking the Diffraction Barrier: Optical Microscopy on a Nanometric Scale," Science 251, 1468-1470 (1991).
2. C. Mihalcea, A. Vollkopf, and E. Oesterschulze, "Reproducible Large-Area Microfabrication of Sub-100 nm Apertures on Hollow Tips," J. Electrochem. Soc. 147, (5) 1970-1972 (2000).
3. H. A. Bethe, "Theory of diffraction by small holes," Phys. Rev. 66, 163-182 (1944).
4. M. Ohtsu, M. and H. Hori, Near-field Nano-optics (Kluwer Academic, New York, 1999) 129.
5. S. M. Mansfield, and G. S. Kino, "Solid Immersion Microscope," Appl. Phys. Lett. 57, 2615-2616 (1990).
6. Q. Wu, G. D. Feke, R. D. Grober, L. P. Ghislain, "Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens," Appl. Phys. Lett. 75, 4064-4066 (1999).
7. M. Shinoda, K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, M. Furuki, M. Takeda, and M. Yamamoto, "High-density near-field readout over 100-GB capacity using a solid immersion lens with NA of 2.05," Proc. SPIE 5069, 306-311 (2003).
8. L. P. Ghislain, and V. B. Elings, "Near-field scanning solid immersion microscope," Appl. Phys. Lett. 72, 2779-2781 (1998).
9. B. D. Terris, H. J. Mamin, D. Rugar, W. R. Studenmund, and G. S. Kino, "Near-field optical data storage using a solid immersion lens," Appl. Phys. Lett. 65, 388-390 (1994).
10. L. P. Ghislain, V. B. Elings, K. B. Crozier, S. R. Manalis, S. C. Minne, K. Wilder, G. S. Kino, and C. F. Quate, "Near-field photolithography with a solid immersion lens," Appl. Phys. Lett. 74, 501-503 (1999).
11. F. Zijp, M. B. van der Mark, J. I. Lee, C. A. Verschuren, B. H. W. Hendriks, M. L. M. Balistreri, H. P. Urbach, M. A. H. van der Aa, and A. V. Padiy, "Near field read-out of a 50 GB first-surface disk with NA=1.9 and a proposal for a cover-layer incident, dual-layer near field system," Proc. SPIE 5380, 209-223 (2004).
12. T. Song, H. Kwon, Y. Yoon, K. Jung, N. Park, and Y. Park, "Aspherical solid immersion lens of integrated optical head for near-field recording," Jpn. J. Appl. Phys. 42, 1082-1089 (2003).
13. K. Ueyanagi, Y. Uehara, Y. Adachi, T. Suzuki, S. Moriyasu, T. Suzuki, K. Wakabayashi, Y. Yamagata, and H. Ohmori, "Fabrication of a hemi-paraboloidal solid immersion mirror and designing of an optical head with the mirror," Jpn. J. Appl. Phys. 42, 898-903 (2003).
14. H. Nishihara, M. Haruna, and T. Suhara, Optical Integrated Circuits (McGraw-Hill, New York, 1989) Sect. 2.2.4.
15. E. Wolf, "Electromagnetic diffraction in optical systems I. An integral representation of the image field," Proc. Roy. Soc. Ser. A 253, 349-357 (1959).
16. B. Richards, and E. Wolf, "Electromagnetic diffraction in optical systems II. Structure of the image field in an aplanatic system," Proc. Roy. Soc. Ser. A 253, 358-379 (1959).
17. A. V. Itagi, T. E. Schlesinger, and D. D. Stancil, "Refraction theory for planar waveguides: Modeling of a mode index integrated solid immersion lens," Jpn. J. Appl. Phys. 42, 740-749 (2003).