Surface acoustic wave induced streaming and pumping in 128° Y-cut LiNbO3 for microfluidic applications

Journal of Micromechanics and Microengineering

Volumn 19, Issue 3, 2009, Pages

  Du, X Y ^a   Swanwick, M E ^a   Fu, Y Q ^a,b   Luo, J K ^a,c   Flewitt, A J ^a   Lee, D S ^d   Maeng, S ^d   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF BOLTON   (United Kingdom)

^d Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC STREAMING; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; FLUID DYNAMICS; NIOBIUM COMPOUNDS; PUMPS; RAYLEIGH WAVES; SILANES;

ACOUSTIC FORCES; HIGH HARMONICS; HIGHER-ORDER HARMONICS; INTER-DIGITATED TRANSDUCERS; LINEAR RELATIONSHIPS; LITHIUM NIOBATE; METALLIZATION RATIOS; MICRO FLUIDIC APPLICATIONS; MIXING EFFICIENCIES; MOVING SPEED; OCTADECYLTRICHLOROSILANE; PROPAGATION LOSS; RF SIGNALS; SAW DEVICES; SIGNAL VOLTAGES; STREAMING VELOCITIES; SURFACE ACOUSTIC WAVES; SURFACE MODIFICATIONS; WAVE MODES;

ACOUSTICS;

EID: 61849145257     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/3/035016     Document Type: Article

References (47)

1. Nguyen N T, Huang X and Chuan T K 2002 MEMS-micropumps: a review J. Fluids Eng. 124 384-92
2. Laser D J and Santiago J G 2004 A review of micropumps J. Micromech. Microeng. 14 R35-84
3. Sritharan K, Strobl C J, Schneider M F and Wixforth A 2005 Acoustic mixing at low Reynolds numbers Appl. Phys. Lett. 88 054102
4. Nguyen N T and Wu Z 2005 Micromixers-a review J. Micromech. Microeng. 15 R1-16
5. Drechsler U, Bürer N, Despont M, Dürig U, Gotsmann B, Robin F and Vettiger P 2003 Cantilevers with nano-heaters for thermomechanical storage application Microelectron. Eng. 67/68 397-404
6. Tan M K, Friend J R and Yeo L Y 2007 Surface acoustic wave driven microchannel flow Proc. of 16th Australasian Fluid Mechanics Conf. (Queensland, Australia, December 2007) pp 790-3
7. 3 J. Micromech. Microeng. 16 539-48
8. Chen Y, Wu T and Chou T 2004 Analysis of the frequency response of a dispersive IDT/ZnO/sapphire SAW filter using effective permittivity and coupling of modes model J. Phys. D: Appl. Phys. 37 120-7
9. Yaralioglu G G, Wygant I O, Marentis T C and Khuri-Yakub B T 2004 Ultrasonic mixing in microfluidic channels using integrated transducers Anal. Chem. 76 3694-8
10. Vivek V, Zeng Y and Kim E S 2000 Novel acoustic-wave micromixer Proc. MEMS'00, 13th IEEE Int. Workshop Micro Electromechanical System (Miyazaki, Japan, 2000) pp 668-73
11. Shiokawa S, Matsui Y and Moriizumi T 1989 Experimental study on liquid streaming by SAW Japan. J. Appl. Phys. 28 126-8
12. Wixforth A 2003 Acoustically driven planar microfluidics Superlattices Microstruct. 33 389-96
13. 3 Proc. IEEE Ultrason. Symp. (2003) vol 2 pp 1790-3
14. Renaudin A, Tabourier P, Zhang V, Camart J C and Druon C 2006 SAW nanopump for handling droplets in view of biological applications Sensors Actuators B113 389-97
15. Wixforth A, Strobl C, Gauer C, Toegl A, Scriba J and Guttenberg Z V 2004 Acoustic manipulation of small droplets Anal. Bioanal. Chem. 379 982-91
16. Collings A F and Caruso F 1997 Biosensors: recent advances Rep. Prog. Phys. 60 1397-445
17. Laude V, Robert L, Daniau W, Khelif A and Ballandras S 2006 Surface acoustic wave trapping in a periodic array of mechanical resonators Appl. Phys. Lett. 89 083515
18. Renaudin A, Tabourier P, Zhang V, Camart J C and Druon C 2006 SAW nanopump for handling droplets in view of biological applications Sensors Actuators B 113 389-97
19. Srinivasan U, Houston M R, Howe R T and Maboudian R 1998 Alkyltrichlorosilane-based self-assembled monolayer films forstiction reduction in silicon micromachines J. Microelectromech. Syst. 7 252-60
20. Maoz R, Yam R, Bercovic G and Sagiv J 1995 Thin Film: Organic Thin Films and Surfaces-Directions for the Nineties vol 20 ed A Ulman (San Diego, CA: Academic) p 41
21. Fendler J H and Meldrum F C 1995 The colloid chemical approach to nanostructured materials Adv. Mater. 7 607
22. Frydman E, Cohen H, Maoz R and Sagiv J 1997 Monolayer damage in XPS measurements as evaluated by independent methods Langmuir 13 5089
23. Huegli R 1993 Harmonic GHz surface acoustic wave filters with unidirectional transducers IEEE Trans. Ultrason. Ferroelectr. Freq. Control 40 177-82
24. Tang I T, Chen H J, Hwang W C, Wang Y C, Houng M P and Wang Y H 2004 Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter J. Cryst. Growth 262 461-6
25. Campbell C and Burgess J C 1989 Surface acoustic wave devices and their signal processing applications J. Acoust. Soc. Am. 89 1479-80
26. Campbell C K 1998 Obtaining the fundamental and harmonic radiation conductances of a reflective SAW interdigital transducer Proc. IEEE Ultrason. Symp. (1998) vol 1 pp 169-73
27. Baer R L and Flory C A 1998 Harmonic operation of SAW filters Proc. IEEE Ultrason. Symp. (1998) vol 1 pp 53-6
28. Campbell C K 1998 Surface Acoustic Wave Devices for Mobile and Wireless Communications (San Diego, CA: Academic)
29. Petroni S, Tripoli G, Combi C, Vigna B, Vittorio M, Todaro M, Epifani G, Cingolani R and Passaseo A 2004 GaN-based surface acoustic wave filters for wireless communications Superlattices Microstruct. 36 825-31
30. Chono K, Shimizu N, Matsui Y, Kondoh J and Shiokawa S 2004 Development of novel atomization system based on SAW streaming Japan J. Appl. Phys. 43 2987-91
31. Royer D and Dieulesaint E 1999 Elastic Waves in Solids I (New York: Springer)
32. Royer D and Dieulesaint E 1999 Elastic Waves in Solids II (New York: Springer)
33. Sritharan K, Strobl C J, Schneider M F and Wixforth A 2006 Acoustic mixing at low Reynolds number Appl. Phys. Lett. 88 054102
34. Tan M K, Friend J R and Yeo L Y 2007 Surface acoustic wave driven microchannel flow Proc. 16th Australasian Fluid Mechanics Conf. (Gold Coast, Australia, 2007) pp 790-3
35. Bruinsma G M, Van Der Mei H C and Busscher H J 2001 Bacterial adhesion to surface hydrophilic and hydrophobic contact lenses Biomaterials 22 3217-24
36. Yarnold G D 1938 The motion of a mercury index in a capillary tube Proc. Phys. Soc. 50 540-52
37. Beyssen D, Brizoual L Le, Elmazria O and Alnot P 2006 Microfluidic device based on surface acoustic wave Sensors Actuators B 118 380-5
38. Furmidge C G L 1962 Studies at phase interfaces: I. The sliding of liquid drops on solid surfaces and a theory for spray retention J. Colloid Sci. 17 309-24
39. Sadkovskaya I V and Eykhval'd A I 2005 Influence of capillary effects on precision of pressure measurement by liquid-level manometer Meas. Tech. 48 237-41
40. Fukagata K, Kasagi N, Ua-arayaporn P and Himeno T 2007 Numerical simulation of gas-liquid two-phase flow and convective heat transfer in a micro tube Int. J. Heat Fluid Flow 28 72-82
41. Kawai A and Suzuki K 2006 Effect of low-surface-tension liquid on pattern collapse analyzed by observing dynamical meniscus Japan J. Appl. Phys. 45 5429-34
42. Kuznetsova I E, Zaitsev B D, Joshi S G and Kuznetsova A S 2005 New method of change of temperature coefficient delay of acoustic waves in thin piezoelectric plates Proc. IEEE. Ultrason. Symp. (2005) vol 2 pp 1272-5
43. Kondoh J, Shimizu N, Matsui Y and Shiokawa S 2005 Liquid heating effects by SAW streaming on the piezoelectric substarte IEEE Trans. Ultrason. Ferroelectr. Freq. Control 52 1881-3
44. Koga T, Morita M, Ishida H, Yakabe H, Sasaki S, Sakata O, Otsuka H and Takahara A 2005 Dependence of the molecular aggregation state of octadecylsiloxane monolayers on preparation methods Langmuir 21 905-10
45. Sano A, Matusi Y and Shiokawa S 1998 New manipulator based on surface acoustic wave streaming Japan J. Appl. Phys. 37 2979-81
46. Du X Y, Fu Y Q, Luo J K, Flewitt A J and Milne W I 2009 Microfluidic pumps employing surface acoustic waves generated in ZnO thin films J. Appl. Phys. 105 024508
47. Du X Y et al 2008 ZnO film thickness effect on surface acoustic wave mode and streaming Appl. Phys. Lett. 93 094105