A study on structural, optical and hydrophobic properties of oblique angle sputter deposited HfO 2 films

Applied Surface Science

Volumn 283, Issue , 2013, Pages 332-338

  Jain, Ravish K ^a   Gautam, Yogendra K ^a   Dave, Vikramaditya ^a   Chawla, Amit K ^b   Chandra, Ramesh ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

^b UNIVERSITY OF PETROLEUM AND ENERGY STUDIES   (India)

Author keywords

AFM; Hydrophobic; Sputtering; UV vis spectrophotometer

Indexed keywords

CONTACT ANGLE; CRYSTAL STRUCTURE; HAFNIUM OXIDES; HYDROPHOBICITY; LENSES; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL COATINGS; OPTOELECTRONIC DEVICES; REFRACTIVE INDEX; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS; TOPOGRAPHY; ULTRAVIOLET VISIBLE SPECTROSCOPY;

DEPOSITION ANGLE; HYDROPHOBIC; HYDROPHOBIC CHARACTER; HYDROPHOBIC PROPERTIES; MONOCLINIC CRYSTAL STRUCTURE; REACTIVE DC MAGNETRON SPUTTERING; UV-VIS SPECTROPHOTOMETERS; UV-VIS SPECTROSCOPY;

OPTICAL FILMS;

EID: 84883172971     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2013.06.112     Document Type: Article

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