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Volumn , Issue , 2005, Pages 239-281

Diffusion Barriers in Semiconductor Devices/Circuits

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EID: 84882926648     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-081551501-2.50007-1     Document Type: Chapter
Times cited : (7)

References (84)
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    • Elsevier, Kidlington, UK, see also several preceding volumes of the MRS Symposia on Low Dielectric Constant Materials, published by MRS, Pittsburgh, PA (1995 through 2002), S.P. Murarka, M. Eizenberg, A.K. Sinha (Eds.)
    • Interlayer Dielectrics for Semiconductor Technologies 2003, Elsevier, Kidlington, UK, see also several preceding volumes of the MRS Symposia on Low Dielectric Constant Materials, published by MRS, Pittsburgh, PA (1995 through 2002). S.P. Murarka, M. Eizenberg, A.K. Sinha (Eds.).
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    • Kolawa E., Pokela P.J., Reid J.S., Chen J.S., Nicolet M.-A. Appl. Surf. Sci. 1991, 53:373. see also the same authors in Trans. 1st Int. High Temp. Electronics Conf, Albuquerque, NM, June 16-20 (1991), and in Abstracts of Advanced Metallization for ULSI Applications, 1991, MRS, Pittsburgh, PA (1992).
    • (1991) Appl. Surf. Sci. , vol.53 , pp. 373
    • Kolawa, E.1    Pokela, P.J.2    Reid, J.S.3    Chen, J.S.4    Nicolet, M.-A.5
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    • Suwwan de Felipe T. Ph. D. thesis 1998, Rensselaer Polytechnic Institute, Troy, NY.
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    • Elsevier, Kidlington, UK, chap. 6, S.P. Murarka, M. Eizenberg, A.K. Sinha (Eds.)
    • Murarka S.P. Interlayer Dielectrics for Semiconductors 2003, Elsevier, Kidlington, UK, chap. 6. S.P. Murarka, M. Eizenberg, A.K. Sinha (Eds.).
    • (2003) Interlayer Dielectrics for Semiconductors
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    • Institute of Physics Publishing, Philadelphia, PA, J.J. Picreaux, P. Bertrand, J.L. Bredas (Eds.)
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    • Nguyen, T.P.1    Ettaik, H.2    Lefrant, S.3    Leising, G.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.