A proposed laser source of ions for nanotechnology

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 139-143

  Freinkman, B G ^a   Eletskii, A V ^b   Zaitsev, S I ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b KURCHATOV INSTITUTE   (Russian Federation)

Author keywords

Focused ion beam; Ion source; Laser cooling; Nanotechnology

Indexed keywords

ABERRATIONS; COOLING; ION BEAMS; IONIZATION; LASER BEAMS; LITHOGRAPHY; NANOTECHNOLOGY;

FOCUSED ION BEAMS (FIB); ION SOURCE; LASER COOLING;

MICROELECTRONICS;

EID: 17344385916     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00087-5     Document Type: Conference Paper

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