Multiparametric virtual metrology model building by job-shop data fusion using a markov chain monte carlo method

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 3, 2013, Pages 319-327

  Tamaki, Kenji ^a   Kaneko, Shun'Ichi ^b  

^a HITACHI LTD   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Advanced process control (APC); chemical mechanical polishing (CMP); Markov chain Monte Carlo (MCMC); virtual metrology (VM)

Indexed keywords

BAYESIAN NETWORKS; CHAINS; DATA FUSION; MARKOV PROCESSES; MONTE CARLO METHODS;

ADVANCED PROCESS CONTROL; CHEMICAL-MECHANICAL POLISHING; JOB-SHOP; MARKOV CHAIN MONTE CARLO; MARKOV CHAIN MONTE CARLO METHOD; MARKOV CHAIN MONTE-CARLO; VIRTUAL METROLOGY;

CHEMICAL MECHANICAL POLISHING;

EID: 84881320809     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2257897     Document Type: Article

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