Process for the fabrication of complex three-dimensional microcoils in fused silica

Optics Letters

Volumn 38, Issue 15, 2013, Pages 2911-2914

  Chen, Feng ^a   Shan, Chao ^a   Liu, Keyin ^a   Yang, Qing ^a   Meng, Xiangwei ^a   He, Shengguan ^a   Si, Jinhai ^a   Yun, Feng ^a   Hou, Xun ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED RESEARCH; FACILE METHOD; FLOWABILITY; HIGH VISCOSITIES; LITHOGRAPHIC FABRICATION; MICROCOILS; ON CHIPS; U-SHAPED;

ASPECT RATIO; FABRICATION; FUSED SILICA; MICROCHANNELS;

THREE DIMENSIONAL;

EID: 84881173690     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.38.002911     Document Type: Article

References (19)

1. S. G. He and F. Chen, J. Micromech. Microeng. 22, 10 (2012).
2. H. Takahashi, T. Dohi, K. Matsumoto, and I. Shimoyama, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).
3. C. H. Ahn and M. G. Allen, J. Micromech. Microeng. 3, 37 (1993).
4. Y. Lu and H.-F. Ji, Sens. Actuators B 123, 2 (2007).
5. K. Yoshimura, K. Nakano, T. Miyake, Y. Hishikawa, C. Kuzuya, T. Katsuno, and S. Motojima, Carbon 45, 1997 (2007).
6. K. Seemann, H. Leiste, and V. Bekker, J. Magn. Magn. Mater. 302, 321 (2006).
7. C. Massin, G. Boero, F. Vincent, J. Abenhaim, P. A. Besse, and R. S. Popovic, Sens. Actuators A 97-98, 280 (2002).
8. T. Dohi, K. Kuwana, K. Matsumoto, and I. Shimoyama, in Proceedings of IEEE Conference on Transducers (IEEE, 2007).
9. M. J. K. Klein, T. Ono, M. Esashi, and J. G. Korvink, J. Micromech. Microeng. 18, 075002 (2008).
10. B. Lochel, A. Maciossek, M. Rothe, and W. Windbracke, Sens. Actuators A 54, 663 (1996).
11. D. A. Seeber, R. L. Cooper, L. Ciobanu, and C. H. Pennington, Rev. Sci. Instrum. 72, 2171 (2001).
12. K. Kratt, V. Badilita, T. Burger, J. G. Korvink, and U. Wallrabe, J. Micromech. Microeng. 20, 015021 (2010).
13. S. Goto, T. Matsunaga, Y. Matsuoka, K. Kuroda, M. Esashi, and Y. Haga, in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (IEEE, 2007).
14. L. O. Sillerud, A. F. McDowell, N. L. Adolphi, R. E. Serda, D. P. Adams, M. J. Vasile, and T. M. Alam, J. Magn. Reson. 181, 2 (2006).
15. R. Osellame, H. J. W. M. Hoekstra, G. Cerullo, and M. Pollnau, Laser Photon. Rev. 5, 3 (2011).
16. B.-B. Xu, H. Xia, L.-G. Niu, Y.-L. Zhang, K. Sun, Q.-D. Chen, Y. Xu, Z.-Q. Lv, Z.-H. Li, H. Misawa, and H.-B. Sun, Small 6, 16 (2010).
17. A. Marcinkevicius and S. Juodkazis, Opt. Lett. 26, 277 (2001).
18. S. He and F. Chen, Opt. Lett. 37, 18 (2012).
19. S. Juodkazis and K. Yamasaki, Appl. Phys. A 79, 4 (2004).