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Volumn 23, Issue 8, 2013, Pages

Microstructure and magnetic properties of micro NiFe alloy arrays for MEMS application

Author keywords

[No Author keywords available]

Indexed keywords

CIRCULAR ARRAYS; FACE-CENTERED CUBIC STRUCTURE; GEOMETRY SIZE; INTEGRATED METHOD; MEMS APPLICATIONS; RECTANGULAR ARRAYS; SOFT MAGNETIC PROPERTIES; SQUARENESS RATIO;

EID: 84881121961     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/8/085013     Document Type: Article
Times cited : (10)

References (14)
  • 1
    • 0035386609 scopus 로고    scopus 로고
    • Magnetic properties of FeCoV film sandwiched by thin soft-magnetic films
    • DOI 10.1109/20.947058, PII S0018946401051706
    • Nozawa T, Nouchi N and Morimoto F 2001 IEEE Trans. Magn. 37 3033-8 (Pubitemid 32969534)
    • (2001) IEEE Transactions on Magnetics , vol.37 , Issue.4 , pp. 3033-3038
    • Nozawa, T.1    Nouchi, N.2    Morimoto, F.3
  • 2
    • 21644479952 scopus 로고    scopus 로고
    • Co-Fe metal/native-oxide multilayers: A new direction in soft magnetic thin film design I. quasi-static properties and dynamic response
    • DOI 10.1109/TMAG.2005.847631
    • Beach G and Berkowitz A E 2005 IEEE Trans. Magn. 41 2043-52 (Pubitemid 40925698)
    • (2005) IEEE Transactions on Magnetics , vol.41 , Issue.6 , pp. 2043-2052
    • Beach, G.S.D.1    Berkowitz, A.E.2
  • 7
    • 31344475748 scopus 로고    scopus 로고
    • Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer
    • DOI 10.1088/0960-1317/16/2/011, PII S0960131706070422
    • Sutanto J, Hesketh P J and Berthelot Y H 2006 J. Micromech. Microeng. 16 266-75 (Pubitemid 43146232)
    • (2006) Journal of Micromechanics and Microengineering , vol.16 , Issue.2 , pp. 266-275
    • Sutanto, J.1    Hesketh, P.J.2    Berthelot, Y.H.3
  • 9
    • 78649748197 scopus 로고    scopus 로고
    • 10.1088/0960-1317/20/11/115021 0960-1317 115021
    • Dong T et al 2010 J. Micromech. Microeng. 20 115021
    • (2010) J. Micromech. Microeng. , vol.20 , Issue.11
    • Dong, T.1
  • 13
    • 84870058457 scopus 로고    scopus 로고
    • Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators
    • 10.1016/j.sna.2011.12.025 0924-4247 A
    • Sun X M, Yuan Q, Fang D M and Zhang H X 2012 Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators Sensors Actuators A 188 190-7
    • (2012) Sensors Actuators , vol.188 , pp. 190-197
    • Sun, X.M.1    Yuan, Q.2    Fang, D.M.3    Zhang, H.X.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.