A microfabricated, low dark current a-Se detector for measurement of microplasma optical emission in the UV for possible use on-site

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8726, Issue , 2013, Pages

  Abbaszadeh, Shiva ^a   Karim, Karim S ^a   Karanassios, Vassili ^b  

^a UNIVERSITY OF WATERLOO   (Canada)

^b UNIVERSITY OF WATERLOO   (Canada)

Author keywords

A Se detector; Microplasma; On site chemical analysis; Portable optical spectrometer; Solid state sensor; UV

Indexed keywords

A-SE DETECTORS; ANALYTICAL PERFORMANCE; FIBER-OPTIC SPECTROMETERS; MICRO-PLASMAS; OPTICAL EMISSION SPECTROMETRY; OPTICAL SPECTROMETERS; PHOTOSENSITIVE MATERIALS; UV;

CHEMICAL ANALYSIS; COOLING; FIBER OPTICS; LIGHT; METAMATERIALS; MICROFABRICATION; OPTICAL EMISSION SPECTROSCOPY; PLASMA DEVICES; SOLID-STATE SENSORS; SPECTROMETERS;

DETECTORS;

EID: 84881071780     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.2016229     Document Type: Conference Paper

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