ESD in FinFET technologies: Past learning and emerging challenges

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2013, Pages

  Linten, Dimitri ^a   Hellings, Geert ^a   Chen, Shih Hung ^a   Groeseneken, Guido ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BULK FINFET; ESD PERFORMANCE; ESD PROTECTION DEVICES; GATE DEVICES; HIGH MOBILITY CHANNELS; LARGE CURRENT; NON-SILICON; THERMAL FAILURE;

ELECTROSTATIC DEVICES; ELECTROSTATIC DISCHARGE; ENGINEERING EDUCATION; FINS (HEAT EXCHANGE); MOSFET DEVICES; SILICON; TECHNOLOGY;

INTEGRATED CIRCUITS;

EID: 84880990313     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IRPS.2013.6531950     Document Type: Conference Paper

References (18)

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