Effect of O2 plasma pretreatment on structural and optical properties of ZnO films on PES substrate by atomic layer deposition

Journal of Industrial and Engineering Chemistry

Volumn 19, Issue 5, 2013, Pages 1638-1641

  Heo, Joo Hoe ^a   Ryu, Hyukhyun ^a   Lee, Won Jae ^b  

^a Inje University   (South Korea)

^b Dong Eui University   (South Korea)

Author keywords

Atomic layer deposition (ALD); Plasma treatment; Polymer substrate; Zinc oxide (ZnO)

Indexed keywords

NEAR BAND EDGE EMISSIONS; PHOTOLUMINESCENCE MEASUREMENTS; PLASMA PRE-TREATMENT; PLASMA TREATMENT; POLYMER SUBSTRATE; PREFERENTIAL ORIENTATION; STRUCTURAL AND OPTICAL PROPERTIES; ZINC OXIDE (ZNO);

DEPOSITION; GRAIN SIZE AND SHAPE; METALLIC FILMS; PLASMA APPLICATIONS; PLASMAS; SUBSTRATES; SURFACE ROUGHNESS; X RAY DIFFRACTION; ZINC OXIDE;

ATOMIC LAYER DEPOSITION;

EID: 84880631862     PISSN: 1226086X     EISSN: 22345957     Source Type: Journal    
DOI: 10.1016/j.jiec.2013.02.001     Document Type: Article

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