Activation process of reversible Pd thin film hydrogen sensors

Sensors and Actuators, B: Chemical

Volumn 186, Issue , 2013, Pages 258-262

  Ollagnier, Antonin ^a   Fabre, Arnaud ^b   Thundat, Thomas ^c   Finot, Eric ^a  

^a UNIVERSITÉ DE BOURGOGNE   (France)

^b CENTRE DE VALDUC   (France)

^c UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Film stress; Hydrogen sensor; Palladium hydride; Thin film

Indexed keywords

ACTIVATION PROCESS; CANTILEVER BENDING; FILM STRESS; HYDROGEN SENSOR; PALLADIUM HYDRIDE; POLYCRYSTALLINE PALLADIUM; RESIDUAL FILM STRESS; SENSOR PERFORMANCE;

CHEMICAL SENSORS; GRAIN BOUNDARIES; HYDRIDES; NANOCANTILEVERS; THIN FILMS;

HYDROGEN;

EID: 84879661218     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2013.05.041     Document Type: Article

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