SCOPUS 정보 검색 플랫폼

Plasma Sources Science and Technology

Volumn 22, Issue 3, 2013, Pages

Experimental and numerical study on the optimization of pulse-modulated radio-frequency discharges

(4) He, Jin a Hu, Jiangtian b Liu, Dawei b Zhang, Yuan Tao a

a SHANDONG UNIVERSITY (China)

b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PLASMAS; COMPUTATIONAL STUDIES; EXPERIMENTAL AND NUMERICAL STUDIES; MODULATION CYCLES; MODULATION FREQUENCIES; PULSED RF DISCHARGE; RADIO FREQUENCY DISCHARGES; REDUCED POWER CONSUMPTION;

ATMOSPHERIC PRESSURE; GAS HEATING; MODULATION;

OPTIMIZATION;

EID: 84878875089 PISSN: 09630252 EISSN: 13616595 Source Type: Journal
DOI: 10.1088/0963-0252/22/3/035008 Document Type: Article

Times cited : (38)

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