Zipping it up: DEAs independent of the elastomer's electric breakdown field

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8340, Issue , 2012, Pages

  Gebbers, Pit ^a,b   Grätzel, Chauncey ^c   Maffli, Luc ^a   Stamm, Christoph ^b   Shea, Herbert ^a  

^a EPFL   (Switzerland)

^b ZURICH UNIVERSITY OF APPLIED SCIENCES   (Switzerland)

^c Optotune AG   (Switzerland)

Author keywords

DEA; electrostatic zipping actuator

Indexed keywords

ACTUATORS; ALUMINUM COATINGS; CONDUCTING POLYMERS; ELECTRIC FIELDS; ELECTROACTIVE POLYMER ACTUATORS; ELECTRODES; ELECTROSTATIC ACTUATORS; MECHANICAL PROPERTIES; MEMBRANES; METAL IONS; PLASTICS;

ACTUATION VOLTAGES; ALTERNATIVE DIELECTRICS; COMPLIANT ELECTRODES; DEA; DESIGN PARAMETERS; ELASTOMER MEMBRANES; ELECTROSTATIC ZIPPING ACTUATOR; MEMBRANE DEFLECTIONS;

ELASTOMERS;

EID: 84878718725     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.915020     Document Type: Conference Paper

References (21)

1. Pelrine, R., Kornbluh, R., Pei, Q. et al., High-speed electrically actuated elastomers with strain greater than 100%, Science, 287(5454), 836 (2000).
2. Bar-Cohen, Y., [Electroactive polymer (EAP) actuators as artificial muscles: reality, potential, and challenges] Society of Photo Optical, (2004).
3. Carpi, F., De Rossi, D., and Kornbluh, R., [Dielectric elastomers as electromechanical transducers: Fundamentals, materials, devices, models and applications of an emerging electroactive polymer technology] Elsevier Science, (2008).
4. Bell, D., Lu, T., Fleck, N. et al., MEMS actuators and sensors: observations on their performance and selection for purpose, Journal of Micromechanics and Microengineering, 15, S153 (2005).
5. Grade, J. D., Jerman, H., and Kenny, T. W., Design of large deflection electrostatic actuators, Microelectromechanical Systems, Journal of, 12(3), 335-343 (2003).
6. Yang, X., [A circular electrostatic zipping actuator for the application of a MEMS tunable capacitor] Massachusetts Institute of Technology, (2005).
7. Li, J., [Electrostatic zipping actuators and their applications to MEMS] Massachusetts Institute of Technology, (2004).
8. Brenner, M. P., Lang, J. H., Li, J. et al., "Optimum Design of an Electrostatic Zipper Actuator," NSTI-Nanotech. 2, 371-374 (2004).
9. Saif, M., Alaca, B., and Sehitoglu, H., Analytical modeling of electrostatic membrane actuator for micro pumps, Journal of Microelectromechanical Systems, 8(3), 335-345 (1999).
10. van der Wijngaart, W., Ask, H., Enoksson, P. et al., A high-stroke, high-pressure electrostatic actuator for valve applications, Sensors and Actuators A: Physical, 100(2-3), 264-271 (2002).
11. Sathe, A., Groll, E., and Garimella, S., Analytical model for an electrostatically actuated miniature diaphragm compressor, Journal of Micromechanics and Microengineering, 18, 035010 (2008).
12. Branebjerg, J., and Gravesen, P., "A new electrostatic actuator providing improved stroke length and force," Micro Electro Mechanical Systems. 6-11 (1992).
13. Horning, R., [PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) Actuator with Macroscopic Action] Honeywell Inc. Plymouth MN, (2002).
14. Binh-Khiem, N., Matsumoto, K., and Shimoyama, I., Polymer thin film deposited on liquid for varifocal encapsulated liquid lenses, Applied Physics Letters, 93(12), 124101-124101-3 (2008).
15. Rosset, S., [Metal Ion Implanted Electrodes for Dielectric Elastomer Actuators] cole Polytechnique Fdrale de Lausanne, (2008).
16. Rosset, S., Niklaus, M., Dubois, P. et al., Metal ion implantation for the fabrication of stretchable electrodes on elastomers, Advanced Functional Materials, 19(3), 470-478 (2009).
17. Niklaus, M., Rosset, S., Dadras, M. et al., Microstructure of 5keV gold-implanted polydimethylsiloxane, Scripta Materialia, 59(8), 893-896 (2008).
18. Niklaus, M., [Metal-Ion Implanted Elastomers: Analysis of Microstructures and Characterization and Modeling of Electrical and Mechanical Properties] cole Polytechnique Fdrale de Lausanne, (2010).
19. Dubois, P., Rosset, S., Niklaus, M. et al., Metal Ion Implanted Compliant Electrodes in Dielectric Electroactive Polymer (EAP) Membranes, Advances in Science and Technology, 61, 18-25 (2009).
20. Creton, C., and Leibler, L., How does tack depend on time of contact and contact pressure?, Journal of Polymer Science Part B: Polymer Physics, 34(3), 545-554 (1996).
21. McPherson, J. W., Kim, J., Shanware, A. et al., Trends in the ultimate breakdown strength of high dielectricconstant materials, Electron Devices, IEEE Transactions on, 50(8), 1771-1778 (2003).