Optimum design of an electrostatic zipper actuator

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 371-374

  Brenner, Michael P ^a   Lang, Jeffrey H ^b   Li, Jian ^c   Slocum, Alexander H ^c  

^a HARVARD UNIVERSITY   (United States)

^b Department of Electrical Engineering and Computer Science   (United States)

^c Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC CONSTANTS; ELECTROSTATIC ZIPPER ACTUATORS; OPTIMUM DESIGNS; PULL-IN INSTABILITY;

ALGORITHMS; CONSTRAINT THEORY; ELASTIC MODULI; ELECTRIC POTENTIAL; ELECTRODES; MATHEMATICAL MODELS; OPTIMAL CONTROL SYSTEMS; OPTIMIZATION; PRODUCT DESIGN;

ELECTROSTATIC ACTUATORS;

EID: 6344223266     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. E. Thielicke and E. Obermeier, Mechatronica, 10, 431 455, 2000.
2. G. Perregaux, S. Gonseth, P. Debergh, J Thiebaud and H. Vuillioenet, in Proc. IEEE 14th Ann. Int. Workshop on Micro Electro Mechanical Syst., Switzerland, 232-235 (2001); E. Thielicke, E. Obermeier, in Proc. IEEE/LEOS Optical MEMS 2002, 159-160 (2002); F. Sherman, C.-J. Kim and J. Woo and C.-M. Ho, in Proc. IEEE 11th Ann. Int. Workshop on Micro Electro Mechanical Sys., Germany, 454-459 (1998).; G. Smith, J. Maloney, L. Fan and D. L. DeVoe, in Proc. of SPIE, 4559, pp. 138-147 (2001).
3. G. Perregaux, S. Gonseth, P. Debergh, J Thiebaud and H. Vuillioenet, in Proc. IEEE 14th Ann. Int. Workshop on Micro Electro Mechanical Syst., Switzerland, 232-235 (2001); E. Thielicke, E. Obermeier, in Proc. IEEE/LEOS Optical MEMS 2002, 159-160 (2002); F. Sherman, C.-J. Kim and J. Woo and C.-M. Ho, in Proc. IEEE 11th Ann. Int. Workshop on Micro Electro Mechanical Sys., Germany, 454-459 (1998).; G. Smith, J. Maloney, L. Fan and D. L. DeVoe, in Proc. of SPIE, 4559, pp. 138-147 (2001).
4. G. Perregaux, S. Gonseth, P. Debergh, J Thiebaud and H. Vuillioenet, in Proc. IEEE 14th Ann. Int. Workshop on Micro Electro Mechanical Syst., Switzerland, 232-235 (2001); E. Thielicke, E. Obermeier, in Proc. IEEE/LEOS Optical MEMS 2002, 159-160 (2002); F. Sherman, C.-J. Kim and J. Woo and C.-M. Ho, in Proc. IEEE 11th Ann. Int. Workshop on Micro Electro Mechanical Sys., Germany, 454-459 (1998).; G. Smith, J. Maloney, L. Fan and D. L. DeVoe, in Proc. of SPIE, 4559, pp. 138-147 (2001).
5. G. Perregaux, S. Gonseth, P. Debergh, J Thiebaud and H. Vuillioenet, in Proc. IEEE 14th Ann. Int. Workshop on Micro Electro Mechanical Syst., Switzerland, 232-235 (2001); E. Thielicke, E. Obermeier, in Proc. IEEE/LEOS Optical MEMS 2002, 159-160 (2002); F. Sherman, C.-J. Kim and J. Woo and C.-M. Ho, in Proc. IEEE 11th Ann. Int. Workshop on Micro Electro Mechanical Sys., Germany, 454-459 (1998).; G. Smith, J. Maloney, L. Fan and D. L. DeVoe, in Proc. of SPIE, 4559, pp. 138-147 (2001).
6. R. Legtenberg, J. Gilbert and S. D. Senturia, J. Microelectromech. Syst., 6, 257-265 (1997).
7. J. Li, M.P. Brenner, J. H. Lang and A. H. Slocum, submitted to J. Microelectromech. Syst.
8. D. Bernstein, P. Guidotti and J.A. Pelesko, Proc. of Model. Simul. Micro 489-492 (2000); J.A. Pelesko, SIAM J. on Appl. Math, 62, 888-908 (2002).
9. D. Bernstein, P. Guidotti and J.A. Pelesko, Proc. of Model. Simul. Micro 489-492 (2000); J.A. Pelesko, SIAM J. on Appl. Math, 62, 888-908 (2002).
10. N V Banichuk, "Problems and Methods of Optimal Structural Design", Plenum Press, New York, 1983.
11. J. B. Keller, Arch. Rat. Mech. Anal. 5, 275, 1960.
12. M. P. Brenner, J. H. Lang, J. Li, J. Qiu, A. H. Slocum, Proc. Natl. Acad. Sci, 100, 9667-9773 (2003).