Deterministically isolated gratings through the directed self-assembly of block copolymers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8680, Issue , 2013, Pages

  Doerk, Gregory Sadasdf ^a   Cheng, Joy Y ^a   Rettner, Charles T ^a   Balakrishnan, Srinivasan ^a   Arellano, Noel ^a   Sanders, Daniel P ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

Block copolymer; Chemical epitaxy; Customization; Directed self assembly; Self aligned

Indexed keywords

BLOCK COPOLYMER DOMAINS; CHEMICAL PATTERN; CUSTOMIZATION; DIRECTED SELF-ASSEMBLY; HIGH RESOLUTION; PATTERN FEATURES; PATTERN TRANSFERS; SELF-ALIGNED;

EPITAXIAL GROWTH; INORGANIC CHEMICALS; SELF ASSEMBLY;

BLOCK COPOLYMERS;

EID: 84878403606     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2011629     Document Type: Conference Paper

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