Patterning of inorganic electrets

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 17, Issue 4, 2010, Pages 994-1000

  Leonov, Vladimir ^a   Van Schaijk, Rob ^b  

^a IMEC   (Belgium)

^b HOLST CENTRE   (Netherlands)

Author keywords

charge pattern; Charge stability; Electrets; inorganic electret films; patterning; photolithography

Indexed keywords

ATMOSPHERIC IONS; CHARGE PATTERN; CHARGE RETENTION; CHARGE STABILITY; ELECTRET FILMS; FEATURE SIZES; GENERAL APPROACH; TECHNICAL APPLICATIONS;

ELECTRETS; FIELD EMISSION; PHOTOLITHOGRAPHY;

POLYETHERIMIDES;

EID: 77955586037     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2010.5539666     Document Type: Article

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