Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvesting

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2012, Pages 1277-1280

  Liu, S W ^a   Lye, S W ^a   Miao, J M ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SYSTEMS; CORONA CHARGING; DAMPING EFFECT; FABRICATION METHOD; FAST CHARGES; LOW-FREQUENCY VIBRATION; MICRO-SCALES; PARALLEL PLATES; POWER OUT PUT; SINUSOIDAL VIBRATION; TWO LAYERS; VIBRATION ENERGIES;

ELECTRETS; ION IMPLANTATION; MEMS;

POWER GENERATION;

EID: 84860491234     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2012.6170390     Document Type: Conference Paper

References (6)

1. thSolid-State Conference, September 22-24,1998, pp.9-16.
2. S. Roundy, P.K. Wright and J. Rabaey, "A study of low level vibrations as a power source for wireless sensor nodes", Computer Communications, vol. 26, pp.1131-1144, 2003.
3. Y. Suzuki, D. Miki, M. Edamoto and M. Honzumi, "A MEMS electret generator with electrostatic levitation for vibration-driven energy harvesting applications ", J. Micromech. Microeng, vol.20, 104002 9 pp, 2010.
4. P. Basset, D. Galayko, A.M. Paracha, F. Marty, A. Dudka and T. Bourouina, "A batch-fabricated and electret-free silicon electrostatic vibration energy harvester", J. Micromech Microeng, vol.19, 115025 12pp, 2009.
5. Y. Arakawa, Y. Suzuki, N. Kasagi, "Micro Seismic Power Generator Using Electret Polymer Film", in Proc. PowerMEMS, 2004, pp. 187-190
6. T. Genda, S. Tanaka and M. Esashi, "Micro-patterned electret for high power electrostatic motor", in 17th IEEE Int. Conf. Micro Electro Mechanical Systems, Maastricht, January 25-29, 2004, pp. 470-473.