Transparent ultraviolet sensors based on magnetron sputtered zno thin films

Advanced Materials Research

Volumn 686, Issue , 2013, Pages 79-85

  Hoon, Jian Wei ^a   Chan, Kah Yoong ^a   Ng, Zi Neng ^a   Tou, Teck Yong ^a  

^a MULTIMEDIA UNIVERSITY   (Malaysia)

Author keywords

Magnetron sputtering; Photocurrent response; UV sensor; ZnO films

Indexed keywords

CURRENT-VOLTAGE MEASUREMENTS; DIRECT CURRENT PLASMAS; HIGH SUBSTRATE TEMPERATURE; PHOTOCURRENT RESPONSE; ROOM TEMPERATURE; ULTRAVIOLET SENSORS; UV SENSOR; ZNO FILMS;

MAGNETRON SPUTTERING; METALLIC FILMS; SUBSTRATES; ZINC OXIDE;

ULTRAVIOLET DEVICES;

EID: 84878255731     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.686.79     Document Type: Conference Paper

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