Modelling and characterization of screen-printed metallic electrothermal microactuators

International Microelectronics and Packaging Society - 3rd IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2007

Volumn , Issue , 2007, Pages 273-277

  Ginet, Patrick ^a   Lucat, Claude ^a   Ménil, Francis ^a   Battaglia, Jean Luc ^b  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b ARTS ET MÉTIERS PARISTECH   (France)

Author keywords

Finite element simulations; Infrared thermography; Sacrificial layer; Thermal microactuator; Thick film

Indexed keywords

ELECTRO-THERMAL MICROACTUATORS; ENERGY DISPERSIVE X-RAY; FINITE ELEMENT SIMULATIONS; METALLIC LAYERS; SACRIFICIAL LAYER; SCREEN-PRINTED; TECHNOLOGY-BASED; THERMAL MICROACTUATORS;

ALUMINA; CERAMIC MATERIALS; ELECTRIC HEATING; MICROELECTRONICS; MICROSYSTEMS; THERMOGRAPHY (IMAGING); THICK FILMS;

MICROACTUATORS;

EID: 84878245402     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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