New screen-printed thermal microactuator

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 87-91

  Ginet, Patrick ^a   Lucat, Claude ^a   Budinger, Marc ^b   Ménil, Francis ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b University of Toulouse Clement Ader Institute   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; SCREEN PRINTING; THIN FILMS;

ELECTROTHERMAL ACTUATORS; ELECTROTHERMAL MICROACTUATORS;

MICROACTUATORS;

SILK SCREEN PRINTING; SIMULATION; THIN FILMS;

EID: 34548132835     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352206     Document Type: Conference Paper

References (17)

1. N. D. Mankagame, G. K. Ananthasuresh, "Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator", J. of Micromechanics and Microengineering, vol. 11, pp. 452-462, 2001.
2. J. Bustillo, R. T. Howe and R. S. Muller, "Surface micromachining for microelectro-mechanical systems", Proc. IEEE, vol. 86, pp. 1552-1574, 1998.
3. J-S. Park, L.L Chu, A.D. Oliver and Y.B. Gianchandani, "Bent-beam electrothermal actuators-Part II: Linear and rotarymicroengines", J. of Microelectromechanical Systems, vol.10, pp. 255-262, 2001.
4. A. Tuantranont, V. Bright, L.-A. Liew, W. Zhang, Y. Lee, "Smart phase-only micromirror array fabricated by standard CMOS process", in Proc. of the 13th Annual International Conference on Micro Electromechanical Systems, MEMS 2000, pp. 455-460, 2000.
5. H. Guckel, J. Klein, T. Christenson, K. Skrobis, M. Laudon and E. Lovell, " Thermo-magnetic metal flexure actuators", in Tech. Digest, Solid State Sensors and Actuators Workshop (Hilton Head, SC, USA), pp. 73-75, 1992.
6. E. T. Enikov and K. Lazarov, "PCB-integrated metallic thermal micro-actuators", Sensors Actuators A, vol. 105, pp. 76-82, 2003.
7. F. Ménil, H. Debéda, C. Lucat, "Screen-printed thick-films : from materials to functionnal devices", J. of European Ceramic Society, vol. 25, pp. 2105-2113, 2005.
8. J. Comtois and V. Bright, "Surface micromachined polysilicon thermal actuator arrays and applications", in Proc. Solid-State Sensors and Actuators Workshop (Hilton Head, SC, USA), pp. 174-177, 1996.
9. C. Lucat, P. Ginet, F. Ménil and H. Debéda, "Préparation de microcomposants multicouches par la méthode de la couche épaisse sacrificielle", French Patent 06 00124, January 06, 2006.
10. Q-A. Huang and N. K. S. Lee, "Analysis and design of polysilicon thermal flexure actuator", J. of Micromechanics and microengineering, vol. 9, pp. 64-70, 1999.
11. èmes Journées du RTP Fiabilité, Carry le Rouet (France), 2004.
12. S. Muratet, S. Lavu, J-Y. Fourniols, G. Bell, M. Desmulliez, "Reliability modelling and analysis of thermal MEMS", Journal of Physics: Conference Series, vol. 34, pp. 235-240, 2006.
13. L. Hin and S.H. Lin, "Vertically driven microactuators by electrothermal buckling effects", Sensors and Actuators A, Vol. A71, pp. 35-39, 1998.
14. W-C Chen, C-C Chu, J. Hsieh, W. Fang, "A reliable single out-of-plane micromachined thermal actuator", Sensors Actuators A, vol. 103, pp. 48-58, 2003.
15. nd Edition, Pergamon International Library, pp. 457-465, 1985
16. Q-A. Huang, N. K. S. Lee, "A simple approach to characterizing the driving force of polysilicon laterally driven thermal microactuators", Sensors Actuators A, vol. 103, pp. 48-58, 2003.
17. E. S. Kolesar, P. B. Allen, J. T. Howard, J. M. Wilken and N. Boydston, "Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections", Thin Solid Films, vol. 355-356, pp. 295-302, 1999.