Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8612, Issue , 2013, Pages

  Gu Stoppel, S ^a   Janes, J ^a   Kaden, D ^a   Quenzer, H J ^a   Hofmann, U ^a   Benecke, W ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

MEMS; micromirror; microscanner; piezoelectric driver; PZT

Indexed keywords

ANALYTIC MODELING; MATERIAL QUALITY; MECHANICAL PERFORMANCE; MICRO MIRROR; MICROSCANNER; PIEZOELECTRIC DRIVERS; PIEZOELECTRIC MEMS; PZT;

AMPLIFICATION; COMPOSITE MICROMECHANICS; FINITE ELEMENT METHOD; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY;

MECHANICAL ACTUATORS;

EID: 84878142005     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.2001620     Document Type: Conference Paper

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