A curved multimorph based electrothermal micromirror with large scan range and low drive voltage

Sensors and Actuators, A: Physical

Volumn 170, Issue 1-2, 2011, Pages 156-163

  Pal, Sagnik ^a   Xie, Huikai ^a  

^a University of Florida   (United States)

Author keywords

Bimorph; Curved actuator; MEMS; Mirror; Multimorph

Indexed keywords

ACTIVE LAYER; ACTUATOR DESIGN; APPLIED VOLTAGES; BEAM DEFORMATION; BIMORPH; BULK- MICROMACHINING; CHIP AREAS; CURVED ACTUATOR; DEVICE FABRICATIONS; DRIVE VOLTAGE; LOW-POWER CONSUMPTION; MICRO MIRROR; MULTIMORPH; POWER INPUT; RESISTIVE HEATERS; RESONANT MODE; SCAN RANGE; SINGLE ACTUATORS; SOI WAFERS; TORSIONAL STIFFNESS;

MIRRORS; NATURAL FREQUENCIES; TUNGSTEN;

ACTUATORS;

EID: 80052264190     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.06.011     Document Type: Article

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