High temperature operation of gimbal-less two axis micromirrors

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Volumn , Issue , 2007, Pages 91-92

  Miner, Andrew ^a   Milanović, Veljko ^a  

^a Adriatic Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ENVIRONMENTS; FIRST ORDERS; HIGH TEMPERATURE; INTERNATIONAL CONFERENCES; MICRO MIRROR DEVICES; MICRO-MIRRORS; MIRROR TILT; NANO-PHOTONICS; OPTICAL MEMS; OPTICAL POWER OPERATION; OPTICAL POWERS; RASTER SCANNING; RESONANT MODES; TEMPERATURE RISE; TEMPERATURE STABILITY; THERMAL MODELLING; TWO-AXIS;

COMPOSITE MICROMECHANICS; HIGH TEMPERATURE OPERATIONS; MEMS; MICROELECTROMECHANICAL DEVICES; PHOTONICS;

MIRRORS;

EID: 48049113927     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2007.4373855     Document Type: Conference Paper

References (3)

1. V. Milanović, et al, "Gimbal-less Monolithic Silicon Actuators For Tip-Tilt-Piston Micromirror Applications," IEEE J. of Select Topics in Quantum Electronics, vol. 10, no. 3, Jun. 2004.
2. V. Milanović, K. Castelino, "Sub-100 μs Settling Time for Gimbal-less Two-Axis Scanners", Optical MEMS 2004, Takamatsu, Japan, Aug. 2004.
3. J. Zhang, Y. C. Lee, A. Tuantranont, and V. M. Bright, "Thermal Analysis of Micromirrors for High-Energy Applications", IEEE Trans. On Advanced Packaging. Vol. 26, no. 3, Aug. 2003.