Polymer-based flexible capacitive sensor for three-axial force measurements

Journal of Micromechanics and Microengineering

Volumn 23, Issue 1, 2013, Pages

  Dobrzynska, J A ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE CHANGE; ELECTRO-MECHANICAL; ELECTRODE DESIGN; FORCE SENSITIVITY; METALLIZATION PROCESS; SENSING APPLICATIONS; STATIC CAPACITANCE; THREE-AXIAL FORCE SENSOR;

AXIAL FLOW; CAPACITANCE; ELASTICITY; POLYIMIDES; POLYMERS; SENSORS; SILICONES;

ELECTROLYTIC CAPACITORS;

EID: 84878127076     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/23/1/015009     Document Type: Article

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