Polymer tactile sensing array with a unit cell of multiple capacitors for three-axis contact force image construction

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 623-626

  Lee, Hyung Kew ^a   Chung, Jaehoon ^a   Chang, Sun Il ^a   Yoon, Euisik ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BASE MATERIAL.; CELL STRUCTURING; CONTACT FORCES; FULL-SCALE RANGE; IMAGE CONSTRUCTION; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; PDMS MEMBRANES; PILLAR STRUCTURE; SHEAR COMPONENTS; SHEAR FORCE; TACTILE CELLS; TACTILE SENSING; TACTILE SENSORS; THREE DIRECTIONS; THREE-AXIS; UNIT CELLS;

CAPACITANCE; CAPACITORS; CELL MEMBRANES; COMPOSITE MICROMECHANICS; CYTOLOGY; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; ENERGY STORAGE; MANGANESE ALLOYS; MANGANESE COMPOUNDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROCHANNELS; MICROELECTROMECHANICAL DEVICES; OPTICAL SENSORS; REACTIVE ION ETCHING; SENSORS;

CELLS;

EID: 50149084062     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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