Structural and optoelectronic properties of AZO/Mo/AZO thin films prepared by rf magnetron sputtering

Materials Letters

Volumn 105, Issue , 2013, Pages 65-67

  Wu, Hung Wei ^a   Chu, Chien Hsun ^b  

^a KUN SHAN UNIVERSITY   (Taiwan)

^b NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Aluminum doped zinc oxide; AZO; AZO Mo AZO; Multilayer; Rf magnetron sputtering; Thin film; Transparent conductive oxides

Indexed keywords

ALUMINUM-DOPED ZINC OXIDE; AZO; AZO/MO/AZO; RF-MAGNETRON SPUTTERING; TRANSPARENT CONDUCTIVE OXIDES;

FILM PREPARATION; MAGNETRON SPUTTERING; MOLYBDENUM; MULTILAYERS; OPTIMIZATION; THIN FILMS; ZINC OXIDE;

ALUMINUM;

EID: 84877951556     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2013.04.017     Document Type: Article

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